Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

ZP

Pad form Flat/Flat with ribs Deep Bellows Stroke (mm) Vacuum entry port Model 04 06 08 04 06 08 04 06 08 2004, 3507, 4010 ZPR02 to 08 Thin section flat series (10 to 16) 38 6 39 38 39 10 ZPR10 to 16 39 40 39 40 40 41 10 ZPR20 25 54 55 56 55 56 57 57 58 59 ZPR32 ZPR40 ZPR50 56 61 126 132 57 58 127 128 62 138 145 63 139 146 129 133 10 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 28 5.5 84 SMC SMC SMC SMC 8 52.5 39 3 5 11.5 6 L2 dimension DIN rail part no.

CJ2

Refer to p.0-39 to 0-46 before handling. 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 1.3-53 Series CJ2Q Mounting Accessories/Refer to p.1.3-12 for details.

CM2

CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

REA/REB

Model selected 10-2-39 39 Series REAL Model Selection 2 Caution on Design 1 How to Find when Selecting the Allowable Load Weight Examples of Allowable Load Weight Calculation Based on Cylinder Mounting Orientation Since the maximum load weight with respect to the cylinder stroke changes as shown in the table below, s should be considered as a coefficient determined in accordance with each

REA/REB

Model selected 10-2-39 39 Series REAL Model Selection 2 Caution on Design 1 How to Find when Selecting the Allowable Load Weight Examples of Allowable Load Weight Calculation Based on Cylinder Mounting Orientation Since the maximum load weight with respect to the cylinder stroke changes as shown in the table below, s should be considered as a coefficient determined in accordance with each

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

CV/MVGQ

Standard stroke (mm) Note) Bore size (mm) CC 25, 50, 75, 100, 125, 150 20 25, 50, 75, 100, 125, 150 25 Symbol Specifications RB 25, 50, 75, 100, 125, 150, 200 32 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 200, 250 40 J Note 1) Intermediate stroke other than above is manufactured upon receipt of order.

7ND9071en

Check that the cabling does not get squeezed by the electronics cover (39) or the device cover (100).

MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

LEC-OM07605CN

PD_ _ ]) . 5-39 5.2.5 2([Pr. PE_ _ ]). 5-42 5.2.6 3([Pr. PF_ _ ]). 5-43 5.2.7 4([Pr.

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

Slider Type Ball Screw Drive/11-LEFS Series

LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ, refer to page 39.

Integrated Controller

150 200 250 Speed: V [mm/s] 39 Easy to Operate Model Selection EQYH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) The following graphs show the values when the external guide is used together.

REC

X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 200 to 1000 NN P RR S U Z ZZ NA Bore size Stroke range 1 8 150 to 700 20 M20 X 1.5 9 146 14 217 226 30 1 8

HRX-OM-Q026

HRSH100/150/200-A: 2 pcs. are used per unit HRS-S0185 Dust-proof filter 1 pc.

CLK1

Auto Switch Weights Unit: g Auto Switch Internal Circuits Lead wire length Model 3m 5m D-P5DWL 150 240 Indicate "Z" at the end of the model number for 5m lead wire.