VQZ1000/2000/3000

The DIN rail is approximately 30 mm longer than the length of manifold. 1.25 L Dimension L = 12.5n + 10.5 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No. L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Table of Contents

21.6 14.9 6 48 55 37 43.5 10 L2 12 12 KQ2W12-99 20.9 Applicable fitting size d d D2 Reducer Elbow: KQ2L Applicable tubing O.D.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750 kPa 750 kPa Number of needle rotations Number of needle rotations Number of needle rotations 14 PF2M7(-L) Series Flow Rate Characteristics at Negative Pressure (Reference Data) When the PF2M series is used with negative pressure (70 to 0 kPa), the measurable range (warranty range of the specifications

CL

56 16 20 22 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.

HRX-OM-Q026

HRSH100/150/200-A: 2 pcs. are used per unit HRS-S0185 Dust-proof filter 1 pc.

ZP

) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Modular F.R.L. Unit

36 60 48 54 AC40-06, AC40A-06 AC40B-06, AC40C-06 AC40D-06 40 72 62 62 Note 1) in the model numbers indicates a thread type.

C95

160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 Rod boot (gaiter) e max f I h Bore (mm) Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

A

37.5 70 65.5 50 54 54 8.5 10 .5 70 2.3 52.5 NAR5000 90 168 48 90 75.5 70 66 65.8 11 13 90 3.2 52.5 NAR6000 95 204.5 48 95 78 70 66 65.8 11 13 90 3.2 D I M E N S I O N S NAR2001 ~ NAR4001 Bracket Port Size Model Part Size A B C D E Bracket Dimensions N F G H J K L M NAR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 NAR25O1 1/4 3/8 53 102.5 25 48 32 30 34 34 44 5.4 15.4 55 2.3

MTS

(55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard Stroke Bore size (mm) Standard stroke (mm) Manufacturable Note) maximum stroke (mm) 6 300 50, 100, 150, 200 10 500 50, 100, 150, 200, 250, 300 50 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 6000 63 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

CY1

, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

SY

750 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 SY3120 -C6 Cv = 0.23 SY5120 -01 Cv = 0.59 SY7120 -02 Cv = 0.87 SY9120 -03 Cv = 2.1 The speed of CJ2 and CM2 cylinders is controlled by a fixed orifice built into the cylinder.

CG1

TT TV ZZ TW Z TX TY TZ Z 20 25 32 3.2 3.2 4.5 35.8 39.8 49.4 43.4 48 59.4 139 146 155 178 (187) 138+l 159+l CD-G02 CD-G25 CD-G03 42 42 48 118 125 131 150 (159) 16 20 22 28 28 28 147+l 168+l 153+l 177+l 198+l 170+l (179+l) 40 4.5 58.4 CD-G04 71.4 56 30 30 (207+l) 225+l 193+l (205+l) 173 (185) 205 (217) 50 6 86 72.4 CD-G05 64 36 36 (237+l) 235+l 198+l (210+l) 178 (190) 215 (227) 63 8 105.4

Table of Contents

150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3 1 Water Cooled Aftercooler Series HAW Model/Standard Specifications Series HAW can cool high temperature compressed air from compressors down to 40C or less and efficiently remove moisture from the air.

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for