VM

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

VQ7-6/7-8

P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

air-filter-e

AFF75B AFF-EL75B AFF2C AFF-EL2B AFF-EL2B-F AFF4C AFF-EL4B AFF-EL4B-F AFF8C AFF-EL8B AFF-EL8B-F AFF22C AFF-EL22B AFF-EL22B-F AFF37B AFF-EL37B AFF-EL2B AFF-EL37B AFF-EL4B AFF-EL8B AFF-EL11B AFF-EL22B AFF-EL75B Except option F For option F Element assembly Cotton paper, others AFF-EL11B AFF-EL11B-F 4 AFF-EL2B-F AFF-EL4B-F AFF-EL8B-F AFF-EL11B-F AFF-EL22B-F 1) Element assembly: With gasket

Air Preparation Equipment

AFF75B AFF-EL75B AFF2C AFF-EL2B AFF-EL2B-F AFF4C AFF-EL4B AFF-EL4B-F AFF8C AFF-EL8B AFF-EL8B-F AFF22C AFF-EL22B AFF-EL22B-F AFF37B AFF-EL37B AFF-EL2B AFF-EL37B AFF-EL4B AFF-EL8B AFF-EL11B AFF-EL22B AFF-EL75B Except option F For option F Element assembly Cotton paper, others AFF-EL11B AFF-EL11B-F 4 AFF-EL2B-F AFF-EL4B-F AFF-EL8B-F AFF-EL11B-F AFF-EL22B-F 1) Element assembly: With gasket

CV/MVGQ

F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

CV/MVGQ

F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

Air Fittings & Tubing

F (inch) Part No.

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

PF2A/PF2W

.S. or less 5% F .S. or less Data Repeatability Note 3) 1% F .S. or less 3% F .S. or less Temperature characteristics 2% F .S. or less (0 to 50C, based on 25C), 1% F .S. or less (15 to 35C, based on 25C) Current consumption (No load) 60 mA or less 50 mA or less Weight 45 g Maximum load current: 80 mA Internal voltage drop: 1V or less (With load current of 80 mA) Maximum applied voltage: 30

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

HRX-OM-R016

Model number: HRS030-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

VQ5000

U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .

Table of Contents - Tubing

Standard How to Order TUH 06 04 B 20 Length per roll Tube O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2001FM-04-X12 Ex.) AS2001FM-04-X21 AQ Note 1) Not particle-free ASV Throttle Valve (Without Check Valve) X214 AK Ex.) AS2001FM-04-X214 VCHC ASR ASQ Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

LEC-OM02704CN

[3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B 8C 8D 8E 1 8F ABS 90 91 14 13 14 (6) ([4][0]) [4][0] [0][1][F][F] (16)10 8 (7) ([5][0]) [5][0] [0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][0] [0][1][F][F] (DWELL) (16)

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

E-P HYREG ® Series VY1 1

Sensitivity 0.5% F.S. 1% F .S. 1.5% F .S. 2% F .S. Repeatability 0.5% F.S. 1% F.S. 1% F.S. 2% F.S.

3 Port Air Operated Valve

Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.