•

171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

VQ4000

Rc 1/4: Rc 1/4 thread C8: One-touch fitting for 8 Rc 3/8: Rc 3/8 thread Note) C10: One-touch fitting for 10 2(4)-G 1/2 C12: One-touch fitting for 12 (Conduit port) U side 3.5 163 130 44 62 95 When U side mounting (S) 6 6 73 When D side mounting (SD) 15 35.5 X 12 X 12 n B A 8 2 4 MODEL SQ (SI No.EX124-SDN1) B A TM 4632 MOD/NET PWR 1 7 SETTINGS 2 4 Manual override B A 6 4 2 B A A B 5 SMC

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Fluoropolymer Piping Equipment

6 x 4 8 x 6 10 x 8 6 x 4 8 x 6 6 x 4 12 x 10 10 x 8 10 x 8 12 x 10 6 x 4 6 x 4 3 x 2 12 x 10 12 x 10 10 x 8 8 x 6 6 x 4 19 x 16 19 x 16 12 x 10 10 x 8 19 x 16 19 x 16 19 x 16 12 x 10 6 x 4 4 x 3 3 x 2 19 x 16 12 x 10 10 x 8 8 x 6 25 x 22 25 x 22 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 25 x 22 25 x 22 19 x 16 19 x 16 12 x 10 6 x 4 25 x 22 25 x 22 25 x 22 LQ1T31-R4 LQ1T31-R7 LQ1T31-R8 LQ1T32

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

VQ5000

240 260 12 568 588 4 240 260 12 568 588 5 281 301 5 281 301 3 199 219 11 527 547 3 199 219 11 527 547 6 322 342 6 322 342 7 363 383 7 363 383 8 404 424 L1 L2 8 404 424 L1 L2 n: Stations (12 stations max.) n: Stations (12 stations max.) 37 Series VQ5000 Base Mounted Type Option Specifications External pilot specifications International thread standards other than Rc Rc specifications are

Compact

$lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales. hwPmfile tlDD|niD Acilaton wiflr$uiiles $enies t)(P Specif ications Brake specifications 9troke (mm) 50, 75, '100, 125,150,175,200 Motor 2-phase stepping motor s-phase steppang motor Screw (mm) 08, Lead 6 08, Lead 12 @8.

LX Series Compact Electric Actuators

S C hwPmfile tlDD|niD Acilaton wiflr$uiiles $enies t)(P Specif ications Brake specifications 9troke (mm) 50, 75, '100, 125,150,175,200 Motor 2-phase stepping motor s-phase steppang motor Screw (mm) 08, Lead 6 08, Lead 12 @8.

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

SV

Refer to Precautions 2 on page 1-2-9. 1-2-57 54 Series SV Manifold Electrical Wiring 10C/16C Circular Connector Type (26 pins) @6 @5 Common Common @4 @3 SOL.B Station 12 SOL.A q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i Light/Surge voltage suppressor !6 !7 w e r !8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Mechanical Valves Series NVM, NVFM, NVZNI

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

IIIIIII

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

CLQ

1 Aluminum alloy Nickel plated Piston Chromium molybdenum steel Chromated @5 9-10-12 12 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Construction: 40 to 100 !5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 !2!1 u @5r @6 @6 !5 A B CL A CL1 MLGC B Extension locking Without magnet !

VQC

6 4 Shield ground SHIELD 9 Optical fiber (reserve) RTS 12 Pin no. 3, 5, 7, 8, 10 and 11 marked with "" are open.

5 Port Solenoid Valve, Series VQC

6 4 Shield ground SHIELD 9 Optical fiber (reserve) RTS 12 Pin no. 3, 5, 7, 8, 10 and 11 marked with "" are open.