Table of Contents

Sub-plate Assembly Part No. 03 04 06 03 04 06 q Description No.

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Modular F.R.L. Unit

Y610(03) 04 Y310Y110-M5 Y210Y310Note 6) 02 03 VHS4002 03 04 VHS40-06 VHS5006 10 VHS20VHS30VHS3002 03 01 02 3-port valve for residual pressure release 02 03 04 06 E400E500-06 Note 6) E100-M5 E20002 03 04 E30001 02 03 02 03 04 E300E600E60006 10 E60006 10 06 10 Piping adapter 02 03 04 06 IS1000E-40 Note 6) Pressure switch with piping adapter IS1000E-20 02 03 04 IS1000E-30 01 02 03 02 03

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM A10 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 F ZP3 T 10 13 16 A12 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 06 3.2 6 Dimensions Per Vacuum Inlet: Barb Fitting C2 Model A Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Speed Controller with Indicator

, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Table of Contents

-04 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AM850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF37C1-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Table of Contents

LVQ Metric sizes 4 04 06 4 6 N.C.

Modular F.R.L. Units

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve 6 VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter 6 E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06-A 10-A 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter 6 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer 6 Y14-M5-A Y24

1

3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

) VQ4 75.4 [82.4] VQ5 VQC 34.5 17.5 15.5 VQZ 29.5 29.5 44.5 SQ 3/8, 1/2 [1(P), 5(EA), 3(EB) port] 96.5 VFS L plug connector (L): SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): SY9 40(R)-WO3 4 5 M8 connector (WO): VFR 3 4 5 3 4 5 3 4 5 D Y SY9 40(R)SY9 40(R)-M03 04 03 04 03 04 03 04 VQ7 Applicable cable O.D. 3.5 to 7 109.2 101.7 75.4 [82.4] Max. 10 202.3 64.9 90.4 (Lead wire length)

ZP

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-04 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AM850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF37C1-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C

VFS

Sub-plate Assembly Part No. 03 04 06 03 04 06 q Description No.

V

R T Metric 00 Built-in Silencer 04 4mm 06 6mm Imperial 00 Built-in Silencer 07 1/4 Models O.D size d D1 D2 L1 L2 L3 L4 M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

CG5-S

AS4211FG-04-10 AS3211FG-02-12 -03-12 AS4211FG-04-12 AS1311FG-M5-23 AS2311FG-01-23 AS1311FG-M5-04 AS2311FG-01-04 -02-04 AS1311FG-M5-06 AS2311FG-01-06 -02-06 AS3311FG-02-06 -03-06 AS2311FG-01-08 -02-08 AS3311FG-02-08 -03-08 3.2 4 6 R 1/4 R 3/8 R 1/8 8 R 1/4 R 3/8 R 1/8 AS2301FG-02-10 AS3301FG-02-10 -03-10 AS4301FG-04-10 AS3301FG-02-12 -03-12 AS4301FG-04-12 AS2311FG-02-10 AS3311FG-02-10 -03-

Flow Control Equipment

Valve Check Valve Series AK Series AQ Model Port size Page Model Port size Page Lip AQ1500 AQ1510 AK2000 AK4000 AK6000 AQ2000 AQ3000 AQ5000 / 1 8 M5 / 1 8, / 1 4 4.5-1 / 1 4, / 3 8, / 1 2 / 3 4, 1 4.3-1 / 1 8, / 1 4 Diaphram / 1 4, / 3 8 / 1 2, / 3 4 Model Applicable tube Page Built-in One-touch Fittings AQ240F-04 AQ240F-06 AQ340F-06 04 06 06 4.3-3 4.0-2 Precautions Be sure to read before

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round