Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

Series AK1000

psig (0.034 to 1.4 MPa) Code Bonnet Standard Panel installation 4) 02 06 10 20 Connections (Inletq, Outletw) No code P 4) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

5 Port Solenoid Valve SY Series

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

HRX-OM-R016

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Modular F.R.L. Unit

, AWD30 30 30 32 AC40 AF40, AR40, AW40 AL40, AFM40, AFD40 AWM40, AWD40 36 36 32 AC40-06, AF40-06, AR40-06, AW40-06 AL40-06, AFM40-06, AFD40-06 E500-06 44 40 32 3/4 E600-06 E600-10 3/4 1 AC50, AC55, AC60, AC50B, AC55B, AC60B AF50, AR50, AL50, AF60, AR60, AL60 53 48 35 Notes) in model numbers indicates a thread type.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Made to Order (Refer to page 700 for details.) 699 AS-FG Series How to Order AS 200 1 F G 06 Lock nut option Nil J Hexagon lock nut Round lock nut Body size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to the below for details.) Applicable tubing O.D.

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 26 27 24 22 22 24 26 27 22 10 to 16 10

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

JXCx-OMT0061CN

CN1(P.21) 5.2 CN2CN3: LE-CP-CN3 CN2 5.3 CN4I/O (1) CN4 (3m) 19 - (2) ( USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN4 () 5.4 CN5: CC-Link CN5 PLC (CC-LinK PLC) 20 - 6.

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

LEC-OM07605CN

V JEM-TR225-2007 200 V 7 2 (1) [Pr.

HRX-OM-W032

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

AZ1000

Flow rate (slpm, N2) AZ1400T 2000 psig (13.8 MPa) 200 psig (1.4 MPa) Inlet pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100