Micro Mechanical Valve Series VM1000

.) 5.5 mm T.T. 2.0 mm O.T. 3.5 mm P.T. 30 N F.O.F. 3 x 18 4 x 4.5 mounting hole VM VM Toggle lever VM430-01-08 T.T.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

V

06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min Courtesy of Steven Engineering, Inc. !

Compact Cylinder with Lock Series CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

RQ

+ Stroke 20Rod end male thread Data Rod end nut L1 Head side flange style: RQG/RDQG Head Side Flange Style Bore size (mm) Stroke range (mm) L1 L A FV M 63 33.5 8 72 30 to 100 80 43.5 10 84.5 40 to 100 B + Stroke 4-FD 100 43.5 12 99 40 to 100 L FT FX FZ A + Stroke Rod end male thread L1 Rod end nut Double clevis style: RQD/RDQD 4-N Cap bolt CT Double Clevis Style Bore size (mm) Stroke range

KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPGR04-06 KPQR04-06 3 39.4 20.1 6 4 M A L 10.4 18 4 4 KPGR04-08 KPQR04-08 41.9 20.2 4 8 KPQR06-08 KPGR06-08 20.8 4 42.5 6 12.8 19.5 10 10 KPQR06-10 KPGR06-10 5 21.2 45 Applicable fitting size d 10 KPGR08-10 KPQR08-10 5 47 23.2 8 15.2

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Series SV

/N.C. 4 position dual 163 (100) 0.54 0.36 2.3 0.24 2.7 0.57 N.O./N.O.

VQ4000

3/8, C8, C10, C12 4(A), 2(B) port 4 A 2 B 8 Rc 1/4: Rc 1/4 thread 4 A 2 B A A B A B A B A B A B A Rc 3/8: Rc 3/8 thread SMC SMC SMC SMC SMC SMC SMC 7 B B B A A A A A A A C8: One-touch fitting for 8 4 A 2 B C10: One-touch fitting for 10 6 C12: One-touch fitting for 12 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3 4 A 2 B 2 P = 25 P = 25 4 A 2 B 1 44 50.5 X Stations 12 38 26.5 Cable length (600

JIS Standard Hydraulic Cylinder

115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2) (n = 2, 3, 4) 105 + 100 (n 2) (n = 2, 3, 4) Different surfaces D-G39 D-K39 D-A3 Note 1) n 100 + 100 (n 2) (n = 2, 3, 4) same surface 1 95 115 105 80 10 35 55 Different surfaces same surface 2 110 100 85 120 35 + 30 (n 2) (n = 2, 3, 4) 85 + 30 (n 2

Speed Controller with One-touch Fitting

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Fluoropolymer Piping Equipment

Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" LVN Size Size Symbol Symbol 1 2 3 4 5 6 03 04 06 08 10 12 19 25 03 07 11 13 19 25 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQHB LQHB 1 1/8" TL TIL 2 1/4" 3 3/8" TLM TILM 4 5 6 1/2" 3/4" 1" TD TID TH TIH Note) For details of the applicable tubing sizes, refer to page 945. Specifications Piping 1.

Compact manifold regulator ARM5 Series

IN/OUT Piping Position SRF Metric size Inch size Symbol Pressure gauge Note) Configuration ITV 4 6 4 4 6 6 4 6 Straight Elbow Straight Elbow OUT side Straight Elbow Straight Elbow OUT side IN side IN side Mounting position Mounting position Fitting type Fitting type IC 5/32 1/4 5/32 5/32 1/4 1/4 5/32 1/4 Nil Symbol Symbol None 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76 77

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

ASV AK Flow Rate and Effective Area ASS AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model ASR 3.2 6 6 8 10 12 6 8 10 12 4 4 Metric size ASF 6 Tubing O.D. 1/8" 3/16" 1/4" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Inch size Flow Direction Symbols on Body 3/16" JIS Symbol Flow rate (l/min (ANR)) Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Symbol Effective