VFR

Port size Nil 06 Without sub-plate 3 4 10 1 10 F Plug-in VFR6 5 0 0 D Non plug-in VFR6 10 1 1 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Symbol Thread type 2 position single Nil Rc Body option (B) (A) 4 2 G F 0 1 Standard Direct manual override N 1 NPT NPTF

C85

to the rod end fR (N) 8 10 12 16 20 25 (MPa) MB1 Foot: L Rod side flange: F Head side flange: G 38 26 36 0.3 18 24 48 1.0 L CA2 29 19 27 14 0.5 18 36 W W W F C8516 23 16 22 11 0.7 14 30 CS1 C8512 15 10 15 6 0.3 9 20 C8510 C76 G 10 6 10 4 0.5 6 14 C858 0.1 C85 8 4 8 3 0.7 4 11 Clevis: C, D Rod side trunnion: U 36 24 35 17 0.3 22 46 C95 C 27 18 26 12 0.5 16 W W 34 D CP95 22 14 21 10 0.7 13

LJ1H

Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Dimensions Applicable fitting size d 4 Model A L D 10-KQP-04 16 32 6 6 10-KQP-06 18 35 8 8 10-KQP-08 20.5 39 10 10 10-KQP-10 22 43 12 Blanking plate assembly : Thread type Nil Rc G F 1 8" 10-KQP-01 16 31.5 5 N NPT 5 32" 10-KQP-03 16 32 6 NPTF T 1 4" 10-KQP-07 18 35 8.5 5 16" 10-KQP-09 20.5 39 10 Caution Mounting screw tightening torque Series Assembly part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

Single VQ0 (2 wire) AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive COM Negative COM Positive COM Double(latching) (3 wire) Negative COM Note) Lead wire length: 300mm The parts numbers above are applicable to 2 to 10 stations. 11 to 16 stations: AXT661A(N)-F-425. 13 14 3. Max. number of stations The max. number of stations depends upon the number of solenoids.

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

TABLE OF CONTENTS

Abrasion Resistance Excellent Excellent Excellent Good Age Resistance Excellent Good Excellent Excellent Steam Resistance Fail Fail Fail Good (to 300 F.) Low Temp Range -40 to -65 F. +10 to -10 F. -40 to -65 F. -40 to -60 F. High Temp. Cont. +230 to +240 F. +325 to + 350 F. +230 to +240 F. +250 to +300 F. Duty High Temp.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD61 C N 10 R 1 CS None None S F N 2 D B E F 3 4 5 6 7 8 B J JSXD61 Series/Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option JSXD71 B N 12 R 1 CS None F N 2 D E F 3 4 5 6 7 8 B J JSXD71 49 Table of UL-compliant Products

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-SV Dimensions: Series 10-SV1000 Directional Control Valves Air Grippers Modular F.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25 50, 75, 100 X L1 With head end lock With rod end lock Bore size (mm) C D E H I K M N OA OB Q RA RB Standard stroke A B L B F L A 65.5 61 4.5 59 54.5 5.5 4.5 10, 15, 20, 25 20 7 10 36 M5 x 0.8 47 8 25.5 5.4 M6 x 1.0 9 9 10 7 80.5 66 14.5 80.5 66 9 14.5 50, 75, 100 69 64 5 62.5 57.5 5.5 5 10, 15, 20, 25 25 12 12 40 M6 x 1.0 52 10 28 5.4 M6 x 1.0 9 11 10 7 84 69 15 84 69 11 15 50, 75, 100

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-11-111 16 Series ZPR ZPR F-0-B (Without buffer/Female thread) 20 25 32 5 8 10 13 16 ZPR F-0-B5 (Without buffer/Female thread) S S Hexagon width across flats 12 N M5 x 0.8 Hexagon width across flats 10 Applicable tubing O.D.Q 8 3 5 Y Applicable tubing O.D.Q R R Hexagon width across flats 12 F F Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 3 E D C

IIIIIIIIII

F-4200-X4W F-4200-X5 F-4200-X10 F-4200-X30 .5"WC .2 .5 1.5 4"WC 5 10 30 10 30 30 30 .5"WC .5 1.0 2.0 1.2"WC .8 1.5 3.0 3A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200-XBARBED FITTING RANGE (PSI) MOUNTING STYLE SPECIAL OPTIONS B80 = NYLON 1/16 ID B85 = NYLON 1/8 ID P80 = POLYSULFONE 1/16 ID P85 = POLYSULFONE 1/8 ID PM = PANEL

Vacuum Pad: Ball Joint Type

Series ZPT F 10-0-A14 (With buffer/One-touch fitting) 20 25 32 J K ZPT F 10-0-A14 (With buffer/One-touch fitting) 40 50 J K Applicable tubing O.D.

MXQ

6.5 14 4-M5 x 0.8 thread depth 7 2 N 1 x F 21 3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4

42

(For F, L, S, T kit) VVQ4000 2A 1 Thread type Electrical entry VVQ4000 3A 1 Thread type Electrical entry Nil Rc N NPT T NPTF F G Nil Rc N NPT T NPTF F G L F , L, S, T kit F Note 1) F kit (Connector location on U side) C C kit (Plug lead type) L F, L, S, T kit F Note 1) F kit (Connector location on D side) C C kit (Plug lead type) SV SYJ Option Option Nil Standard W Note 2) IP65 enclosure

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting Rod end thread 21 22 Relief type Vacuum suction type B L F Basic Axial foot Flange Nil F Male rod end Female rod end Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Model Port size Lubrication Rubber Air 10-/21-CM2W20 10-/21-CM2W25 10-/21-CM2W32 10-/21-CM2W40 11-/22-CM2W20 11-/22-CM2W25 11-/22-CM2W32 11-/22-CM2W40 1/8 Relief type

7

) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10, 3/8", 12 91 (97) 22.5 30 45 20 6 13.5 41.5 25 33

A

NPT A mm B mm C mm S Y M B O L S NAMF150-N02 14" 139 63 10 NAMF250-N03 38" 152 76 10 NAMF350-N04 12" 184 90 10 NAMF450-N06 34" 205 106 10 NAMF550-N10 1" 239 122 10 NAMF650-N14 112" 321 160 10 NAMF850-N20 2" 403 220 10 Note) (N)AMF AMF Japanese NAMF North American H O W T O O R D E R O D O R R E M O V A L F I LT E R S E R I E S (N)AMF IN, OUT R E V E R S E D I R E C T I O N R (N)AMF B O D