Metal Seal/Rubber Seal Series VQ Body Ported

Blanking plug KQ2P04 06 08 It is inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces. Dimensions A L D Model Applicable fittings size d KQ2P-04 KQ2P-06 KQ2P-08 4 6 8 32 35 39 6 8 10 16 18 20.5 DIN rail mounting bracket VVQ2000-57A-4 When ordering assemblies incorporated with a manifold, add suffix -D to the manifold no.

Speed Controller with One-touch Fitting

, 07 500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

M1 ASR ASQ AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

Pulse Valve

type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (40A) R Rc N NPT F G *1 Seals and washers are included. r Fluid and ambient temperatures t With/without silencer B 40 to 60C Symbol Port size 06 10 14 Nil Without V V V S With V y Pilot port size * Port size: 14 only Select Nil for 06 and 10.

Compact Manifold Regulator Series ARM5

ARM5B R 06 A Individual Supply Type 3. Options 1.

AS-FG/ASD-FG

(ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000 10, 11, 12 08, 09 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle revolutions Number of needle revolutions 11 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 Parts list Material Note Description Note Description No. 12 Material No. 1 Body A Elbow body Knob Body

2/3 Port Valve

(mm) mm Flow rate coefficient Max. system pressure (MPa) (1) Port size Weight (g) Cv Water Air Model AC DC AC DC AC DC Effective area (mm2) 34 10 1.9 600 10 VXZ2232-02 0.7 0.6 0.7 0.6 0.7 0.6 1 4 1 4 10 43 2.4 600 10 VXZ2232-03 0.7 0.6 0.7 0.6 0.7 0.6 3 8 3 8 . 0.7 VXZ2242-04 0 1.5 15 95 5.3 850 15 0.7 0.6 0.7 0.6 0.6 1 2 1 2 165 20 9.2 1,370 20 VXZ2352-06 0.7 0.6 0.7 0.6 0.7 0.6 3 4 3 4

AIR COMBINATION

*-A AR30-A AFM30-A AL30-A AR30-A AFM30-A AL30-A AR30-A AF40-A AF40-A AW40-A AF40-A AW40-A AC40*-A AR40-A AFM40-A AL40-A AR40-A AFM40-A AL40-A AR40-A AF40-06-A AF40-06-A AW40-06-A AF40-06-A AW40-06-A AC40*-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A 10 Option / Semi-standard : Select one each for a to m.

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

KQ2

M5 M6 01 02 03 04 00 04 06 08 10 12 16 99 M5 x 0.8 M6 x 1.0 3.2 4 6 8 10 12 16 4 6 8 10 12 16 Thread connection Tubing (Rod) connection 23 04 06 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 R , Rc R , Rc R , Rc R , Rc 08 10 12 16 Same dia. tubing (Reducer) Different dia. tubing Same dia. rod Model Male connector Hexagon socket head universal male elbow Universal male elbow 45 male elbow Branch union elbow

Table of Contents

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

VEX1

AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 AN300-03 AN400-04 AN400-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900-20 VEX3 23 4 03 04 VEX35004 06 10 VEX37010 12 VEX39014 20 1959 Series VEX3 How to Order Electrical entry (Only with solenoid) Body size Port size Symbol Body size Electrical entry Port size Port 3 (R) 1 (P), 2 (A) 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet

Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

High Purity Chemical Valve

Tubing size Valve type 4 8 Symbol 03 04 05 06 07 06 07 08 10 11 10 11 12 13 Body class Tubing size 0 N.C. 10 3, 1/8" 4 3/16" Body type 2 A Stacking type for manifold 6 1/4" 6 1/4" Lever operation Lever operation Non-locking type (self-reset type) Locking type Symbol Nil L 8 3 10 3/8" 10 3/8" LQ2 integral fitting 4 12 1/2" 485 Series LVH Threaded type manifold/Variations How to Order Manifold

KB

KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Holder mounting Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002FS TMH-23J TMH-04J TMH-06J AS2002FS AS2052FS TMH-06 TMH-08 AS3002FS TMH-07 TMH-10 TMH-12 AS4002FS TMH-13 Tubing size Applicable model The applicable TMH for the AS1002FS-02 is not available.

SX

AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x

HEC-OM-S008

operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.