C85

Mounting style Symbol F Y Mounting Front nose Front nose in line port Option R2 Stainless steel piston rod and rod end nut Bore size Stroke Standard stroke (mm) Bore size (mm) Max. stroke (mm) 8 10 12 16 20 25 100 10, 25, 40, 50, 80, 100 10, 25, 40, 50, 80, 100, 125, 160 10, 25, 40, 50, 80, 100, 125, 160 160 160 Other strokes on request.

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 0 and 100.

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

Air Cylinder

, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

With auto switch: MDSUB3 1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V) 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99(V)/T99(V)/S9P(V) CRB2 CRBU2 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 15 0.4 0.3 150 0.4 0.4 MHK 40 10 0.3 0.3 100 0.2 0.2 0.2 MHS 5 20 50 MHC 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHT MHW2-25D MHW2-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10 20 D0 20 40 60 Gripping point L (mm) 100 80 20 40 60 Gripping point L (mm) 80 100 120 140 160 0 20Confirmation of Gripping Point MHY Step 2 MHW 200 60 H H 50 Overhang H (mm) Overhang H (mm) MHW2-20D 150 MHW2-25D MHW2

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

In the case the load voltage is 100 or 200V AC. Be sure to use the contact protection box in any case mentioned above. Otherwise, the contact life may be shortened. (Due to permanent energizing conditions.)

SZ3000

(Station 1) Light/surge voltage suppressor Side A: Orange Side B: Green (7.5) 43.5 Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123

5 Port Solenoid Valve, Series VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

,

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

,

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)