60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 290 L/min 295 L/min 095 L/min 4.60 V 18.4 mA 70% 30% 280 L/min 284 L/min 084 L/min 4.20 V 16.8 mA 60% 40% 420 mA 15V [mA] [V] -76No.PF-OMJ0005CN-I Revision
l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than
AS32l1F-U02-12A 12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A 16 23.8 34.8
weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212
34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12
34.5 17 50 (51) AS321FSG-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-03-10 (S) 10 15.9 26.7 37 28 15.6 39 (40) AS321FSG-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FSG-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG
(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].
L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q
Side porfed NW3Z34o'OaO 1-m Applicble valv .NW3Z3-40-O1-0 NVZ3!+OOO NVZ3!41\,i-OOO fst orAa*rt 1O-32Nom. (M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.
Actual values may differ depending on the piping conditions or sliding friction, so please use this graph as a guideline only. 500 Cylinder bore size 6 10 400 Cylinder speed (mm/s) 16 300 20 25 200 32 40 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Diameter of orifice (mm) 490
34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04
Series: LEY, Size: 40, Motor Mounting Position: D (In-line), Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 40: 8mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: F (Rod Flange, Parallel, In-line), Actuator Cable Type, Length: R3 (3m), Controller: C9H (EhterNet/
Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 350, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: CE1 (JXCE1, EtherCAT®, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)
Series: LEY, Size: 40, Motor Mounting Position: Top Side Parallel, Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 200mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: R3 (3m), Controller
Series: LEY, Size: 40, Motor Mounting Position: Top Side Parallel, Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 40: 16mm), Stroke: 150mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: R3 (3m), Controller
Series: LEY, Size: 40, Motor Mounting Position: D (In-line), Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 200mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: R3 (3m), Controller:
Series: LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 600mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3 (
Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: G (High-performance Battery-less Absolute, Step Motor 24 VDC), Lead: B (Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: without Lock, Grease Application: N (without Roller Specification), Actuator Cable Type, Length: R3 (3), Controller: C9H (EhterNet/IPâ„¢), Controller Mounting: 8 (DIN Rail)
Size: 40, Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 500mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: L (Foot, Top Mounting), Actuator Cable Type, Length: R3 (3m)
For single axis Actuator cable type/length Nil Without cable S1 Standard cable 1.5 m S3 Standard cable 3 m S5 Standard cable 5 m R1 Robotic cable 1.5 m R3 Robotic cable 3 m R5 Robotic cable 5 m R8 Robotic cable 8 m*1 Option Caution Nil Without option S With straight type DeviceNet communication plug for JXCD1 T With T-branch type DeviceNet communication plug for JXCD1 [CE-compliant products