Size: 16, Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 30mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included)

Table of Contents

{Port 3 (R2) is individual and 5 (R1) is common.}

42

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

Fluoropolymer Piping Equipment

LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 LQ1 6 x 4 3/8" x 1/4" 2 3 LQ3 LQ3 10 x 8 1/2" x 3/8" 4 3 LVN 8 x 6 3/4" x 5/8" 5 LQHB 12 x 10 4 1" x 7/8" TL TIL 6 19 x 16 5 1 1/4" x 1.1" 7 TLM TILM Note) For

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

VQZ1000/2000/3000

R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2 Series VQ7-6 DIN Connector Type 2 position/Single : VQ7-6-FG-S Single (reverse pressure): VQ7-6-YZ-S 50 68.5 52 120.5 68.5 120.5 2-6.5 Mounting hole 50 25 25 42.5 42.5 13 (port A) 13 (port B) 3-Rc3/8 (R1, R2) Manual override R1 R2 P B A 14 50 62 11 9 12 38 50 62 13 A B R1 R2 P 2-Rc1/8 13 34 Indicator

0.4

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1)

VQ7-6/7-8

{Port 3 (R2) is individual and 5 (R1) is common.}

2

/8 02 R1/4 03 R3/8 04 R1/2 Fittings Applicable tubing O.D.

Size: 16, Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: D (Double Clevis, Top Mounting), Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 16, Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 1 (I/O Cable,

Size: 16, Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 16, Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 50mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail

Size: 16, Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I

Size: 16, Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: None, Actuator: LEY, Body Size: 16, Motor Mounting: Top Mounting Type, Lead: B (16: 5mm; 25: 6mm; 12; 32/40: 8mm), Stroke: 150mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail), Cable Connector: None, Actuator: LEY, Body Size: 16, Motor Mounting: Top Mounting Type, Lead: B (16: 5mm; 25: 6mm; 12; 32/40: 8mm), Stroke: 50mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail), Cable Connector: None, Actuator: LEY, Body Size: 16, Motor Mounting: Top Mounting Type, Lead: B (16: 5mm; 25: 6mm; 12; 32/40: 8mm), Stroke: 100mm

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: None, Actuator: LEY, Body Size: 16, Motor Mounting: Top Mounting Type, Lead: 16: 5mm; 25: 6mm; 12; 32/40: 8mm, Stroke: 150mm