Size: 32, Motor Mounting Position: Left, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller Mounting

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 5m, Controller Mounting

Size: 40, Motor Mounting Position: Left, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 5m, Controller Mounting

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 5m, Controller Mounting

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Standard Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: Without Cable, Controller Mounting

Accuracy: Basic, Motor Mounting Position: Top Mounting, Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: 2.86mm, Stroke: 200mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut is Included, Mounting: Double Clevis, Cable Type: Robotic Cable, Flexible Cable, Cable Length: 10m, Driver Type: A2 [LECSA2

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECP1, PNP, Programless Type, I/O Cable Length for LEC: 1.5m, Controller Mounting

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: Without Cable

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 5m, Controller Mounting

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 5m, Controller Mounting

Size: 100, Motor Mounting Position: Top Side Parallel, Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: L (2mm), Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: D (Double Clevis), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: A (10m), Driver Type: B2 (LECSB2-T9/Pulse Input, 200V to 240V)

Size: 100, Motor Mounting Position: Top Side Parallel, Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: D (3.33mm), Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: D (Double Clevis), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 2 (2m), Driver Type: 92 (LECSN2-T9-9/EtherNet/IPâ„¢, 200V to 240V), I/O Cable Length: 1 (

Size: 32, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 200mm, Motor Option: B (with Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Male), Mounting: D (Double Clevis), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: C51 (JXC51, Parallel NPN, Step Data Input Type), I/O Cable Length

Table of Contents

{Port 3 (R2) is individual and 5 (R1) is common.}

42

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

Fluoropolymer Piping Equipment

LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 LQ1 6 x 4 3/8" x 1/4" 2 3 LQ3 LQ3 10 x 8 1/2" x 3/8" 4 3 LVN 8 x 6 3/4" x 5/8" 5 LQHB 12 x 10 4 1" x 7/8" TL TIL 6 19 x 16 5 1 1/4" x 1.1" 7 TLM TILM Note) For

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

VQZ1000/2000/3000

R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.