Serial Network

EX141-SSD1 (with network M12 Connector) EX140-SSD1-X16 (with network AMP connector) EX120/121/122-SMJ1 EX124 (U, D)-SMJ1 EX140-SMJ1 SDS SQ1000/2000, SZ3000/5000 N 0 16 VQ, SX, SY & SV VQ2000/4000/5000 SQ1000/2000, SZ3000/5000 N Y N 16 16 16 16 16 16 0 0 0 0 0 CC-Link EX120/121/122-SMB1 EX123/124(U, D)-SMB1 IN313-MB1 N Y N VQ, SX, SY & SV VQ2000/4000/5000 (N)VFR/S, (N)VZS, ISO MelsecNet Mini-S3

Vacuum System Peripherals:

.: MELSECNET MINI-S3 Data Link System B C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M When creating the mixed specifications, complete the stations table on the right.

Size: 32, Motor Mounting: Right Side Parallel Type, Motor Type: S7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 30mm, Motor Option: w/o Option, Rod End: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Double Clevis, Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSB1, 100V to 120V, I/O Connector: w/Connector

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 30mm, Motor Option: w/o Option, Rod End: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Double Clevis, Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSB1, 100V to 120V, I/O Connector: w/Connector

Size: 32, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 30mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis), Controller Position: B (Integrated Controller), Parallel Input: 5 (NPN)

Size: 16, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 30mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: CE1 (JXCE1, EtherCAT®), I/O Cable Length for LEC: Without Cable, Controller

Size: 32, Motor Mounting Position: Top Side Parallel, Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 30mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting: R (Right Side Parallel Type), Motor Type: T6 [AC Servo Motor, (Absolute Encoder), Output 100W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 30mm, Motor Option: w/o Option, Rod End: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis), Actuator Cable Type: S (Standard Cable), Cable Length: 5 (5m), Controller Type: S2 (LECSS2-T, 200V to 240V

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 30mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length for LEC: 3 (3m

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 30mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length for LEC: 5 (5m

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 30mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length for LEC: 1 (1.5m

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: CE1 (JXCE1, EtherCAT®), I/O Cable Length for LEC: Without Cable, Controller

Size: 32, Motor Mounting Position: Top Side Parallel, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 3; Size 32: 4, Stroke: 30mm, Motor Option: without Option, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Double Clevis, Controller Position: Integrated Controller, Parallel Input: NPN

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Standard Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller Mounting: -, Communication

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 5m, Controller Mounting: -, Communication

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: JXCE1, EtherCAT®, I/O Cable Length for LEC: Without Cable, Controller Mounting: DIN Rail

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Standard Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 1.5m, Controller Mounting: DIN

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: JXCE1, EtherCAT®, I/O Cable Length for LEC: Without Cable, Controller Mounting: Screw Mounting

Size: 25, Motor Mounting: Right Side Parallel Type, Motor Type: T6 [AC Servo Motor, (Absolute Encoder), Output 100W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 30mm, Motor Option: w/o Option, Rod End: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Double Clevis, Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSS2-T, 200V to 240V, I/O Connector: w/Connector