NCA1

XD Y LF P ZD 200 (2) 1 3/4-16 1 1/8 2.6 1 1/2 1/2 3/4 1/2 1/2 7/8 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 3/4 5/8 1/2 1 3/8 6 1/8 2.09 3 5/8 2.40 6 5/8 250 (2.5) 1 3/4-16 1 1/8 3.1 1 1/2 1/2 3/4 1/2 1/2 7/8 5/16-24 3 0 3/8 3/8 3/8 1.30 1.06 3/4 5/8 1/2 1 3/8 6 1/4 2.13 3 3/4 2.48 6 3/4 325 (3.25) 1 3/8 1-14 1 5/8 3.9 2 5/8 1 1/4 3/4 3/4 1 1/4 3/8-24 3.75 0 1/2 5/8 5/8 1.57 1.18 1 1/4 1 3/4

Series SV

Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 Plug SV1000 SV2000 SV3000 SV4000 Since EX500 and EX120 type SI units are not included, order them separately.

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

VQ5000

D side Stations 1 2 3 4 5 6 7 8 9 10 11 12 Description/Model (A) 4 (B) 2 2 position single 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 2 position double 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position closed center Valves Options Port size (ports A, B) Enter in case of mixed sizes (CM). 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position exhaust center 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position pressure center 1 (P)3

SZ3000

(A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (Length 300 mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

With light/surge voltage suppressor Z 2 B 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.O./N.O. 2(B) 4(A) B Electrical entry MN: Without lead wire MO: Without connector M: With lead wire (Length 300 mm) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.C.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Nil A 4 (A) 4 (B) 2 S With surge voltage suppressor A 2 With light/Surge voltage suppressor B SOL.b SOL.a Z 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.O./N.O. (A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (length 300mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

CL

3 !4 !5 !6 !

CJ2

3 !

MGP

IC circuit Z80 No 3 wire (NPN) Y59A Y69A 5V 12V IC circuit 3 wire (PNP) Y7PV Y7P P. 60 2 wire Y59B Y69B 12V 3 wire (NPN) Y7NW Y7NWV Solid state switch 5V 12V IC circuit Diagnostic indication (2 color indicator) Relay, PLC Grommet Yes 24V 3 wire (PNP) Y7PW P. 61 Y7PWV Y7BW Y7BWV 12V Water resistant (2 color indicator) Y7BA 2 wire P. 62 Note 3) Magnetic field resistant (2 color indicator

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

MXS

3 !4 !5 !6 !7 !8 !

1

121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.

VDW Series

115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.

C95

3 !4 !5 !6 !7 !8 !

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

Series IDG

1l/min = 0.035SCFM IDG 10 H 03 Optional specifications Flow rate by size Symbol Contents Size Outlet air flow rate Purge air flow rate l/min (ANR) Size 5 10 20 30 3 50 60 75 100 50/6 3 25/3 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S Standard

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

MGP

circuit Z80 No 3 wire (NPN) Y59A Y69A 5V 12V IC circuit 3 wire (PNP) Y7PV Y7P P. 60 2 wire Y59B Y69B 12V 3 wire (NPN) Y7NW Y7NWV Solid state switch IC circuit 5V 12V Diagnostic indication (2 color indicator) Relay, PLC Grommet Yes 24V 3 wire (PNP) Y7PW P. 61 Y7PWV Y7BW Y7BWV 12V Water resistant (2 color indicator) Y7BA 2 wire P. 62 Note 3) Magnetic field resistant (2 color indicator