Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(IN OUT) 2 3 (OUT EXH) Flow rate characteristics Port size Valve model Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(IN), 2(OUT) 3(EXH) 3 8 1 2 3 4 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 21 0.39 5.8 28 0.36 7.6 26 0.35 7.0 VP3145 3 4 1.5 Weight (kg) Port size Effective area (mm2) Valve model Grommet 1 (IN), 2 (OUT) 3(EXH) 1 2 (IN OUT) 230 280 310 570 650 650 2 3 (OUT EXH) 280 310

Large Type Vacuum Unit Series ZR

Valve + Digital vacuum switch + Filter ZR100-K1M-D1 Circuit diagram 1 2-Elliptical hole (mounting hole) 2 10 2 10 2 23 PS PE Note) 1 indicates the dimension when bracket A is mounted.

10-SYJ3000

LN, MN type: With 2 sockets. Refer to page 371 for the lead wire length of L and M plug connectors. Refer to page 374 for the connector assembly with cover for L and M plug connectors. For connector cable of M8 connector, refer to page 374. M8 connector conforming to IEC60947-5-2 standard is also available. Refer to page 369 for details. Note 1) Enter the cable length symbols in .

Series

"LN", "MN" types: with 2 sockets. For connector cable of M8 connector, refer to page 562. Note 1) Be sure to enter a symbol of the cable length in with reference to P562. 496

How to Order

type + + R port P, E port Pilot valve exhaust is centralized to main valve. + + H: Lead wire length 600 mm D: Push-turn locking slotted type LN: Without lead wire LO: Without connector MO: Without connector W: With connector cable Note 1) + -+ LN, MN type: With 2 sockets.

SYJ300

LN, MN type: with 2 sockets. For connector cable of M8 connector, refer to page 4-4-60. Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached. Order them separately, if necessary. (For details, refer to page 4-4-11.) 4-4-6

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

(mm) D (D1): 6, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1/4B(8A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

Fitting Type: H (Straight), Size Combination: 22 (Tubing: 6 x 4; Thread: 1/4"), Piping Type: F (Female)

Fitting Type: H (Straight), Size Combination: 22 (Tubing: 6 x 4; Thread: 1/4"), Piping Type: M (Male)

Fitting Type: H (Straight), Size Combination: 22 (Tubing: 6 x 4; Thread: 1/4"), Piping Type: F (Female), Thread: N (NPT)

Fitting Type: Straight, Size Combination: Tubing: 6 x 4; Thread: 1/4", Piping Type: Female, Thread: -, Packaging: -

Fitting Type: Straight, Size Combination: Tubing: 6 x 4; Thread: 1/4", Piping Type: Female, Thread: NPT, Packaging: -

NCA1

/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4 2 1/8 3/4 2 3/4 2 1/4 3/4 2 1/2 2 3/8 BORE

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) 15.8 9.5 16.5 20.5 17.5 P = 16 M3 M12 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 1 P P 1 BUS 0 P 1 1 P BUS 0 0 0 X PE PE x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, N3 6

NCA1

13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 NCA1-P800 1 1/2 1 21/32 4 1/2 3/4 2 1/4 1 1/2 1 1 1/4 3.25 NCA1-P1000 2 1 3/8 21/32 5 7/8 3 2 1/8 1 3/8 1 5/8 3.81 NCA1-P1200 2 1/2 1 3/4 29/32 6 1/2 7/8 3 1/8 2 1/4 1 3/4 2 1/8 4.95 NCA1-P1400 2 1/2 2 1 1/16 7 1/2 1 3 1/2 2 1/2 2 2 7/16 5.75 NCA1-P1401 3 2 1/2 1 3/16 8 1/2 1 3/4 4 3/4 2 5

Proposals for Energy Saving

Flow coefficient Port size Rc Proof pressure MPa Max. system pressure MPa Max. operating pressure differential MPa Weight g Orifice mm Cv Effective area mm Model N.C. 1/8 (6A) 2 0 VXA213 2 0 VXA212 2 0 VXA213 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA226 2 0 6 1.0 0.5 1.0 1.0 0.33 0.61 0.33 3 4.5 3 VXA212 11 6 170 0.5 1.0 0.6 0.2 0.1 1.0

VQ5000

(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA