7

1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

15

M2 T2 PD PP LEC SS-T NZ M5 x 0.8 10 70 50 3.5 22.5 78 M3 x 12 1.5 M5 x 22 3 14 17.7 NY M4 x 0.7 8 70 50 3.5 22.5 78 M3 x 12 3.6 M5 x 22 3 14 17.7 NX M5 x 0.8 10 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NW M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 9 11.7 NV M4 x 0.7 8 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NU M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 11 11.7

Best Pneumatics Vol. 14

T-interface (T): M5 x 0.8, 1/8, 1/4, 3/8, 1/2 E Using a T-interface facilitates the redirection of air flow.

I

10V DC 2 1/4 (2000, 3000 Type) 3 3/8 (2000, 3000 Type) 4 1/2 (3000 Type) T H R E A D T Y P E M O N I T O R O U T P U T Rc N NPT T NPTF F G 1 Analog Output 1 ~ 5V DC 2 Switch Output / NPN Output 3 Switch Output / PNP Output 4 Analog Output 4 ~ 20mA DC Courtesy of Steven Engineering, Inc. !

NCA1

X B 5 S T D.R O D T H R E A D S T D.R O D B O R E S I Z E 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please contact SMC Customer Service for larger sizes R E F E R TO PAG E 22 F O R O P T I O N A L RO D T H R E A D S 3 Dimensional Drawings Expanded Series NCA1 MF1 1.5 ~ 6 WITH FRONT RECTANGULAR FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM

Air Cylinder NCA1 Series

X B 5 S T D.R O D T H R E A D S T D.R O D B O R E S I Z E 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please contact P/A Customer Service for larger sizes R E F E R TO PAG E 22 F O R O P T I O N A L RO D T H R E A D S 3 Dimensional Drawings Expanded Series NCA1 MF1 1.5 ~ 6 WITH FRONT RECTANGULAR FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM

Modular Design with Uniform Body Style

For use, a separate spacer (or spacer with bracket) is required. 51-1 A Attachments AC-D Series T-Spacer: 1/8, 1/4, 3/8, 1/2, 3/4 Using a T-spacer facilitates the branching of air flow.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

ZP3

ZP3 T 04 B N A5 With adapter From p. 149 p. 160 From p. 162 ZP3 T 04 B N J 3 B5 With buffer From p. 152 p. 161 p. 164 q w e r t y u Bellows type q Vacuum inlet direction w Pad diameter t Buffer stroke 04 4 06 6 08 8 Nil Pad unit T Vertical Y Lateral Stroke [mm] Buffer specification J JB K 3 6 10 15 20 e Material r Buffer specification N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive

2/3 Port Valve

T F N Table q Port/Orifice Size Table w Voltage-Electrical Entry-Options Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z Orifice size 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) Solenoid C D, T G, C S(1) T VX31 VX32 VX33 01( ) 02( ) 02( ) 03( ) 02( ) 1 8 1 4 1 4 3 8 1 4 AC 03( ) 3 8 Ordering Example (

Rotary Actuator

3 @8 @7 @5 @4 e t !4 !1 i !0 !2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

Compact 5-Port Solenoid Valve

Specification With power-saving circuit (Continuous duty type): 0.1 W (JSY3000/5000) External pilot JSY 3 1 0 0 Z 5 JSY3000/5000 Series q w e r t y Base mounted q Series w Type of actuation y Manual override 1 JSY1000 3 JSY3000 5 JSY5000 1 2-position Single 2 Double 3 3-position Closed center 4 Exhaust center 5 Pressure center A 4-position dual 3-port D: Push-turn locking slotted type Nil

Table of Contents

2 u t o !3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Modular F.R.L. Unit

Note 2) Drain guide: G1/4 (applicable to AC25 to 60) AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR Port size M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 AC20C to 40C AF + AFM + [T] + AR AC20 to 40 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

42

(Values at the initial period) Note 3) Available only with T, L, S and C. 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3-position double check (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 450 Base Mounted Plug-in/Plug Lead: Single Unit VQ4000 Series How to Order Valves (Single Unit) [Option] Port size Body Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 1/4 03 3/8 Thread type SV Nil Rc F G N NPT

CJ2

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

High Vacuum Angle Valve

(Including w, r, t, u, i, o, !

Title not found

t,"?, H, L r u. E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

Made to Order

Note 3) At 0.5 MPa.