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Part Number Description: REGULATOR STAINLESS STEEL*LQA   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 124   Family Description: SR SS REGULATOR   Class Code: DD   Part Code: 1   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: REGULATOR STAINLESS STEEL*LQA   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 124   Family Description: SR SS REGULATOR   Class Code: DB   Part Code: 1   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: REGULATOR S/STEEL SPL   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 124   Family Description: SR SS REGULATOR   Class Code: DB   Part Code: 1   Reference Code:  K   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: REGULATOR S/STEEL CLEAN   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 124   Family Description: SR SS REGULATOR   Class Code: ED   Part Code: 1   Reference Code:  K   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Insert the cover. 13 XL-OMO0001-A Revision history Limited warranty and Disclaimer SR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 14 XL-OMO0001-A

,150ms , ,300ms,, 10100ms (+150ms) ms 300ms 150ms ON ON OFF 10~100ms 10100ms *8 RS-232C ,CEU5 CEU5 2 , ,2 *9 () ,DC 1 , 2.5s ,3s *10 30ms ON 24 - ,,, ,, , 2ROM) 7-4 (E 2ROM (1)E / 2ROM ,E RS-232C NO. 2ROM , ON,E 2ROM ,E 2ROM 80 ,LCD E2FUL SMC (2)E , (3),,LCD E2Err 25 - 8 RS-232C 8-1 RS-232C 1200,2400,4800,9600,19200bps ASCII 1 7 1 8-2 (1) VR DR DW PR PW FR FW SR

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas Features 1 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

. | "sloplion | IFoistandard -+1 type moddes I XroolFor AB, modute sr oodure m6t be o(derd separat6ry I I "ou.,'" Series 1N313 Serial Interfuce Modules 1N313 AB2 Accessories D-sub connectors Qn Series NVFR2000:Base Mounted Type Construction/Parts List ffi 2 position single 2 oosilion double |}$e$[ E A A P B E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute

PlungsFinllnc Nv|, vM 068 (1) vM 06A (2) Roller Plumsrinllnc sr. vM 068S (1) vM 06AS (2) Rolle Plunger.Sot 90' Nvl. vM 078 (1) vM 07A (2) Rollot Plungcr-Sd 9(P sil.

(340) rwz3000 Tape 43 Manifold,/ Side Ported inch (mm) Grornmet (G) L Vpe plug connector (L) : With indicator light and surge volaoe supprsssor Ll 2.O5 (52) 2.64 (68) 3.31 (84) 3.94 .(1m) 4.57 (116) 5.20 (132) 5.83 (148) 6.46 (164) 7.09 080) 7.72 (96) 8.35 tzz) 8.98 \228) 9.61 \244) 10.24 (260) 10.87 \276) 11.50 \m2) 12.13 (308) 12.76 (324) 13.39 (340) Lz 1.69 (43) (59) 2.95 (75) 3.58 (sr

^-'-t" +'' l' tv."' 2',Sr " ,:; . a . ' li'J.Sh.' A--T.Tr/ir.{ 8r " 4 ' l e A . a ' A . , .

3flrin c8-se of (6so)sr=13.6ks 1s) a=1366=6.6 catculation formuta tor cr (o<1) 3ff9i,3?

D-E75A (+) E | 'FesisLort Black ;fi-+4--lrl" (-) o Series NCX2 6.14 10.14 Aub sr.{itch, Hot*ing motr tpe: },lCDBXAnrc-if, Wr$ Auto $yilch End Cate mor.r Vpe itCDPXZtrt|o-m Notq This diagram is for D-A7 or D-A8 type. ( ): D'menson wdh D-F/ or D.J7 type. o Series NCX2 Ncx2@/5-ffiffi/Dimrnsions ,., l{cx2trs-rco rcx2015-3@ irc,c!

SQUARE FI.ANGE (SR LOCK / srot ffi l r g (lloloq llo. P! llonber l|odol (n.fl IC TH SA SB loll tre Wl. (ot.) sf?rr-t2 M483010056 9M2000 5e es .41 .62 3.50 2.75 1r 20 Ali drmensions in inches. -i FFH FooT MoUNT XIT (Fil) Pt\4120. PM220 PRO125, PRO225 Typical Foot Mount Installation PM1500, Pr\42000 (ltolog 1{o.

Example) Manifold model: ZZMA04-SR (1 pc.) Ejector model: ZMA073H-K5-T14C (3 pcs.) ZH073H-J5LZ (1 pc.)

(FR-BSF01FR-BLF()) 13 21 13 (2) (a) () TDKZCAT3035-1330NECESD-SR-25 ZCAT3035-1330(TDK) [] [mm] 10100MHz 100500MHz 391 131 341 80 150 301 TDK (ZCAT3035-1330) (b) () ACACAC MC 20cm ()972A-2003 50411 (AC200V) AC[V] C[F] R[] [mm] AC[V] 200 0.5 50(1W) T-C 181.5 1000(15s) 6 10 10 103 103 4 151 31.51 200 200 481.5 DCDC 4 2 RA 13 22 13 (c) AERSBAN-SET SD ( A B ) 40 2-5 17.5

(FR-BSF01FR-BLF) 11 26 11 (2) (a) () TDKZCAT3035-1330NECTOKIN ESD-SR-250 ZCAT3035-1330(TDK) [] [mm] [mm] 10100MHz 100500MHz 341 391 131 80 150 301 TDK (ZCAT3035-1330) ZCAT3035-1330 (b) () ACAC ON OFF MC MC SK 20cm 20cm ()CR-50500(OKAYA) C R [30%] [mm] AC[V] [F20] 625VAC50/60Hz 60s -2000VAC A W G 1 8 1 5 1 250 0.5 50(1/2W) 3 . 6 50/60Hz 60s C R 5 0 5 0 0 6 1 6 1 3 0 0 m i m 3 0 0

(2) (a) () TDKZCAT3035-1330NEC TOKINESD-SR-250GRFC-13 ZCAT3035-1330(TDK) [] [mm] 131 10MHz100MHz 100MHz500MHz 80 150 3 9 1 301 34 1 (ZCAT3035-1330) (B) () AC ON OFF MC MC SK 20 cm ()CR-50500(OKAYA) C [30%] mm] R AC [V] [F20%] :625V AC50/60Hz 60s -2000V AC 50/60Hz 60s 250 0.5 50 (1/2W) AWG 18 (18.5+2)1 151 3.6 61 61 300 300 481.5 161 (18.5+5) DC 4 2 + RA 11 21 11.

8No.PS-OMF0005CN-E * DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR