SX

1-12.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

SZ3000

Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor The common polarity should be the same as the common specifications of the valve to be used.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor The common polarity should be the same as the common specifications of the valve to be used.

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MDSUB1 P211070-1 MDSUB3 P211090-1 MDSUB7 P211060-1 Auto switches are not included with switch units.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

VQZ100V-OMT0001

(VQ111) [] () (V111) 1 DC24V/12V 2 AC100V 3 AC200V 4 AC 9 No.VQZ100V-OMT0001 VQZ Series/ / / / P P P P R R R R DIN DIN DIN DIN ISO#:EN ISO#:EN ISO#:EN ISO#:EN-175301 175301 175301 175301-803 803 803 803C C C C( ( ( ( DIN DIN DIN DIN 43650C)( 43650C)( 43650C)( 43650C)( 8mm) 8mm) 8mm) 8mm) DIN IP65() () 90 :3.57 ()JIS.C3306 0.5mm 2 3 1(p)3R2R5R1 3(R2 3(R2 3(R2 3(R2 R) R) R) R)

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

1!2!

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

1!2!

VZA2000

0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position 1/8 Body side M5 x 0.8 3 position 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Single 0.54 0.19 2.2 0.56 0.23 2.4 Body side 2 position 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Double 0.54 0.19 2.2 0.56 0.23 Body side 2.4 M5

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

VFA3000

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

Rotary Table Series MSU

Internal construction with auto switch Model Auto switch unit part number MDSUA1, 3 MDSUA7, 20 P211070-1 MDSUA 1 P211090-1 MDSUA 3 P211060-1 MDSUA 7 Auto switches are not included with switch units.

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, same diameters connection, Applicable Tube Outer Dia. (mm) D (D1): 8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 3

Fitting Type: U (Straight Union), Size Combination: 32 (8mm x 6mm)

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)