Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: N.O., Port 3 IN, Port 2 OUT, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Table of Contents

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

LEC-OM07605CN

281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A

Table of Contents

LVN Types 10, 20 Stainless steel VVDW 2 0 5A TI/ TIL Series PA 1 2 10 20 PAX PB Type 30 VVCW20-5A 17-2-73 14 For details about certified products conforming to international standards, visit us at www.smcworld.com.

ZX

ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

0.4

SQ How to Order Connectors VFS Lead wire length (m) ZS-20-A ZS-20-5A-50 Without lead wire (Connector 1 pc., Socket 4 pcs.) With lead wire Nil 30 50 0.6 3 5 VFR Flow/Exhaust Characteristics of Ejector Unit VQ7 (The flow rate characteristics are for the supply pressure of 0.5 MPa.)

Stability of suction position,

Description Material (Surface treatment) Note XT661 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR Pad form: Flat type with groove, Bellows type with groove 2 Plate Aluminum alloy (Clear anodized) 3 O-ring FKM 4 Shaft Stainless steel 5a Shaft ring A Stainless steel 5b Shaft ring B Stainless steel

IDUS/IDFS

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

Stainless Steel Heat

Breaker capacity 5A Sensitivity current 15 to 30mA L Option symbol With heavy duty auto drain A dryer with heavy duty auto drain (ADH4000-04) is installed instead of the float type auto drain (AD44).

IDX-OM-W023

600mm 050 600mm 600mm 600mm 600mm IDU Series 2 1 IDX-OM-W023 2 2 2 2 6 6-3 IDU8E~15E1 IDF-AB500 14 1 IDU8EIDU15E1 2 2 3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 1 IDU8E IDF-BP320 1 IDU11E IDF-BP322 1 IDU15E1 IDU Series 2 2 IDX-OM-W023 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDU8E-1015E1-10100V 100V 30mA 10A IDU8E-2015E1-20200V IDU8E-2315E1-23200V AC200V 30mA 5A

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Vacuum System Peripherals:

Individual SUP spacer assembly Individual EXH spacer assembly Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-2A SUP/EXH block assembly (for R): SX3000-51-3A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-2A SUP/EXH block assembly (for S): SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A

2

Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) Singlephase Singleturn 500 VA IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg 1 kVA IDF-TR 2 OUTPUT label C A Output outlet Input fuse 5A