ZX

ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

Table of Contents

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

Stainless Steel Heat

Breaker capacity 5A Sensitivity current 15 to 30mA L Option symbol With heavy duty auto drain A dryer with heavy duty auto drain (ADH4000-04) is installed instead of the float type auto drain (AD44).

IDX-OM-W023

600mm 050 600mm 600mm 600mm 600mm IDU Series 2 1 IDX-OM-W023 2 2 2 2 6 6-3 IDU8E~15E1 IDF-AB500 14 1 IDU8EIDU15E1 2 2 3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 1 IDU8E IDF-BP320 1 IDU11E IDF-BP322 1 IDU15E1 IDU Series 2 2 IDX-OM-W023 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDU8E-1015E1-10100V 100V 30mA 10A IDU8E-2015E1-20200V IDU8E-2315E1-23200V AC200V 30mA 5A

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Vacuum System Peripherals:

Individual SUP spacer assembly Individual EXH spacer assembly Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-2A SUP/EXH block assembly (for R): SX3000-51-3A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-2A SUP/EXH block assembly (for S): SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A

2

Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) Singlephase Singleturn 500 VA IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg 1 kVA IDF-TR 2 OUTPUT label C A Output outlet Input fuse 5A

0.4

SQ How to Order Connectors VFS Lead wire length (m) ZS-20-A ZS-20-5A-50 Without lead wire (Connector 1 pc., Socket 4 pcs.) With lead wire Nil 30 50 0.6 3 5 VFR Flow/Exhaust Characteristics of Ejector Unit VQ7 (The flow rate characteristics are for the supply pressure of 0.5 MPa.)

Stability of suction position,

Description Material (Surface treatment) Note XT661 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR Pad form: Flat type with groove, Bellows type with groove 2 Plate Aluminum alloy (Clear anodized) 3 O-ring FKM 4 Shaft Stainless steel 5a Shaft ring A Stainless steel 5b Shaft ring B Stainless steel

IDUS/IDFS

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)