SMC Pneumatic Clean Series

6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100

Magnetically Coupled Rodless Cylinder

6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

Refrigerated Air Dryers

*1 Values obtained from Correction Factors on page 6. 3 Check the coefficient.

CE

0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

High Vacuum Angle Valve

Replacement Heaters Temperature specification Valve size 100 160 H4 (100C heater) XLA25-60S-2 (2 sets) XLA25-60S-2 (3 sets) H5 (120C heater) XLA25-60S-2 (3 sets) XLA25-60S-2 (4 sets) Example) For the XLm-100H5-X152 with a heater, 3 sets of the XLA25-60S-2 are required. 6 Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use

MGG

6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 D2 L2 A 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

HRL

Application Division Default setting 1 24 VDC output Output 2 24 VDC input Input 3 Contact input signal 1 Input Run/Stop1 4 Contact input signal 3 Input Operation mode request signal (fix)2 5 Contact output signal 6 Output OFF1 6 Contact output signal 1 Output Run status signal [N.O. type] (fix)2 7 Contact output signal 3 Output Operation continuation WRN alarm signal [N.C. type] (fix)2

MY1

6 6 6 6 T 6 6 7 12 12 15 15 EA 7 10 12 14 17 20 26 W 58 58 70 88 104 128 152 Shock absorber unit model RB0806 RB0806 RB1007 RB1412 RB1412 RB2015 RB2015 8 Series MY1W Side Supports Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142

2–4

3 !2 !7 !6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

MLGP

6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

MLGP

6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

MQQ

B C d H D E F MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 20.5 M5 x 0.8 8 9.2 6 15.5 5 9.2 4 10 10 8 22.5 M6 x 1.0 8 9.2 8 16.5 6 11.5 5 16 16 10 24.5 M8 x 1.25 8 9.2 10 18.5 6 15 5 20 20 13 33.5 M10 x 1.25 10 11.5 12 22.5 11 19.6 6 25 25 17 40.5 M14 x 1.5 14 16 16 28.5 12 25.4 8 28 28 22 Applicable bore size (mm) Part no.

MB1

6 !9 !5 i q r y e @3@0 t!7@2!8wu!4!3 1 1MBK32 only A Rod sectional view A-A' A' !2!1 Parts list No. Description Material Note Description Material Note No.

MIW/MIS

Lead wire length (m) Load voltage Auto switch model Flexible lead wire (-X61) In-line 0.5 (Nil) 3 (L) 5 (Z) DC AC Special function light Wiring (output) Electrical entry direction Applicable Electrical entry Indicator Type load Perpendicular F9N F9P F9B F9NV F8N F9PV F8P F9BV F8B 3-wire (NPN) 3-wire (PNP) Solid state (switch) Relay PLC 2-wire 12V Yes Grommet 24V 3-wire (NPN) 3-wire

Slide Tables MX Series

Bolt used Max. tightening torqueN.m{kgf.cm} l mm Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10.5 12.5 16 21 26 32 1.2{12.2} 1.2{12.2} 2.8{28.6} 5.7{58.1} 5.7{58.1} 10{100} M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 3. Top body tapped A hand can be caught by an adjuster option.