CV/MVGQ

2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible. (0.95 W) High-pressure type (1.0 MPa) K Note 2) Caution Use the standard (DC) specification when continuously energizing for long periods of time.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible. (0.95 W) High-pressure type (1.0 MPa) K Note 2) Caution Use the standard (DC) specification when continuously energizing for long periods of time.

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

IDX-OM-W010

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W013

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W020

. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12

IDX-OM-W011

2 1 IDX-OM-W011 2 2 2 2 6 6-2 IDF4E15E1 IDF-AB500 14 1 IDF4EIDF15E1 2 2 3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 2-2 IDF Series 2 2 IDX-OM-W011 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDF1E-1015E1-10100V 100V 30mA 10A IDF3E-2015E1-20200V AC200V IDF3E11E-20:30mA 5A IDF15E1-20:30mA 10A 2-2 IDF Series 2 3 IDX-OM-W011 2 1.25 216AWG 3 812 0.1m 30m M3 1.25-3 6.5mm

VDW

2 stns. + 3 stns. x 2 3 stns. x 3 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

IDX-OM-W017

6-5 IDFA Series 6 5 IDX-OM-W017 7 A A 7 1 7 2 A 7 3 7 4 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3/h(ANR) 1) 8 23 29 32 39 72 m 10 1ANR65% 2 IDFA Series 7-1 7 1 IDX-OM-W017 8 C C 8-1 1) 2) 8-2 8-1 IDFA Series 8 1 IDX-OM-W017 9 K 9 K 4-2 9-1 1. 1 2 2. 3.

Shock Absorbers and Rate Controls

* O . b 3 z o 1 0 0 6 o u o q ; N q * E 9 . " o . 5 " > 2 4 ' ;l l.:, . . o o o 2 4 6 8 1 0 1 2 1 4 1 6 1 8 2 0 TOTAL ENERGY ( nrbtc) (Tho!ends) Note: Minimum impact velocity tor PM nlodels it 4 itr/*c. 9k**k &"bs*rbers Non-Adjustable Hydraulic Series 49rc.

EX510

19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 Mbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 125 k/250 k/ 500 kbps Communication speed 4-branch input Specified file Note 2) EDS file GSD file 64/64 Possible to change depending on the switch setting 96/96 (3 stations, remote device station) Possible to change depending on the switch setting Occupied area (Number of inputs/outputs) 4-branch

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

Vacuum Ejector Series ZM

VJ10-36-1A-10 . 2 pcs.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

0.55

; Symbol 2-position single 2-position single 2(B) (A)4 8 (EA)5 1 3(EB) (P) Strainer 4 3 2 5 1 2 (A) (EB) (B) (EA) (P) : = @ > ; Symbol 2-position double 2-position double 2(B) (A)4 (EA)5 1 3(EB) (P) 8 5 2 4 3 2 1 (A) (P) (B) (EB) (EA) Symbol 3-position closed center/exhaust center/pressure center 3-position closed center 2(B) (A)4 : = @ > ; (EA)5 1 3(EB) (P) 3-position exhaust center 2(B

IDX-OM-W089

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.