IDX-OM-W023

600mm 050 600mm 600mm 600mm 600mm IDU Series 2 1 IDX-OM-W023 2 2 2 2 6 6-3 IDU8E~15E1 IDF-AB500 14 1 IDU8EIDU15E1 2 2 3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 1 IDU8E IDF-BP320 1 IDU11E IDF-BP322 1 IDU15E1 IDU Series 2 2 IDX-OM-W023 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDU8E-1015E1-10100V 100V 30mA 10A IDU8E-2015E1-20200V IDU8E-2315E1-23200V AC200V 30mA 5A

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Vacuum System Peripherals:

Individual SUP spacer assembly Individual EXH spacer assembly Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-2A SUP/EXH block assembly (for R): SX3000-51-3A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-2A SUP/EXH block assembly (for S): SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A

2

Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) Singlephase Singleturn 500 VA IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg 1 kVA IDF-TR 2 OUTPUT label C A Output outlet Input fuse 5A

0.4

SQ How to Order Connectors VFS Lead wire length (m) ZS-20-A ZS-20-5A-50 Without lead wire (Connector 1 pc., Socket 4 pcs.) With lead wire Nil 30 50 0.6 3 5 VFR Flow/Exhaust Characteristics of Ejector Unit VQ7 (The flow rate characteristics are for the supply pressure of 0.5 MPa.)

Stability of suction position,

Description Material (Surface treatment) Note XT661 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR Pad form: Flat type with groove, Bellows type with groove 2 Plate Aluminum alloy (Clear anodized) 3 O-ring FKM 4 Shaft Stainless steel 5a Shaft ring A Stainless steel 5b Shaft ring B Stainless steel

IDUS/IDFS

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

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HEC_W-E

Electric specifications of the power supply HEC006 AC200-220V, 50/60Hz 5A Single phase 2-wire type + GND (PE) line HEC012 AC200-220V, 50/60Hz 10A Single phase 2-wire type + GND (PE) line Do not bend, pull or bind the power supply cable with a strong force.

IDX-OM-W094

22 IDFA60 (IDFA70/80/90) 1) 2830Nm 2) 10.4 1 1 IDFA60/70/80/90 Series 10-2 IDX-OM-W094 R 11 R R (GFCI) 11.1 11.2 IDFA60-23-R IDFA70-23-R IDFA80-23-R IDFA90-23-R (A) 10 15 20 30 (mA) 30 IDFA60/70/80/90 Series 11-1 IDX-OM-W094 R 11.3 M3.5 1.01.3Nm M4.0 1.42.0Nm L N () TEST () [3.2.5 ] L N IDFA60/70/80/90 Series 11-2 IDX-OM-W094 T 12 T T 12.1 12.2 z z AC240V / DC24V 5A

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number. (Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

VSA4

Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number. (Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

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Shock Absorbers and Rate Controls

Po.l l{lntel Itodel (Rell f( FH RD nt 5A s0 Boh Sizew4l (s) itlllitilxl ,5 NI210{9141 trR)0rMl.l5 5.5 o < 41.3 50.8 44.528.6 [5 RFlll36rl.5 Nl2t293r?9 .R)0EMt.25 5.5 9.5 4t.3 58.844.5?8.6 M5 30 Prtl!+-l2 M5t?

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Stainless steel Types 10, 20 VVDW 2 0 5A Series 1 2 10 20 Type 30 VVCW20-5A 12 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW100/200 How to Order Valves (Single Type) VD W 2 50 1 G 2 01 For water, air and vacuum Series Option 2 3 200 300 None Foot type bracket Nil F Note) Foot brackets are packed with valves. Materials and insulation type C.O.

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IDX-OM-W093

() / 2A() DC20V 3mA IDF60/70/80/90 Series 12-1 IDX-OM-W093 T 12.3 AC200/220V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDF60/70/80/90 Series 12-2 IDX-OM-W093 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm Y L1 L2 PE L3 1 2 3 4 5 6 7 Y L PE N 1 2 3 4 5 6 7 B B L1,L2,L3: A L,N: PE A PE IDF60-20-T IDF70-20-T IDF80-20-T IDF90-20-T M3.5 M4.0 8.5mm 9.5mm IDF60-30-T, IDF70-30-T