Rotary Actuator

LL LL Key dimensions [mm] Size Key dimensions LL 30 3 x 3 x 14 3 50 5 x 5 x 25 5 63 6 x 6 x 30 5 80 6 x 6 x 40 5 100 8 x 7 x 45 5 D215 CRA1 Series Symbol Shaft Pattern Sequencing2 -XA33 to -XA59 Applicable shaft type: X, Z, T, J, K How to Order C RA1 Z X D B J 50 90 M9BW A33 A34 C8 C30 Number of auto switches Magnet Nil 2 pcs. S 1 pc.

Rotary Actuator/Vane Type

CRB2 CRB2 W1 = L3 = L1 = CRB1 L4 = Y = L2 = MSU X = Applicable shaft types: J, K, T Applicable shaft type: K W2 = CRJ [mm] CRA1 CRB2, CRBU2 X W1 L1 max L3 max J K T J K T J K T J K T 10 6.5 to 14 0.5 to 2 X-3 L1-1 15 8 to 18 0.5 to 2.5 X-4 L1-1 20 9 to 20 0.5 to 3 X-4.5 L1-1 30 11.5 to 22 0.5 to 4 X-5 L1-2 40 15.5 to 30 0.5 to 5 X-5.5 L1-2 [mm] Size CRB2, CRBU2 Y W2 L2 max L4 max 10 4.5

Table of Contents

SB, counterbore depth SC P.C.D.R (Mounting hole) Auto switch mounting groove dimentions (2 locations) MHS3-16D MHS3-20D MHS3-25D 5 6 4 54 54 5 4 6.5 54 4 5 3 3 3 5 5 33 33 33 (mm) I G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 NB 0 0.030 0 0.030 0 0.030 DC 15 18 21 NA 8 10 12 DO 17 20 24 K 4 5 6 B 30 36 42 R 25 29 34 J 10 12 14 AA 35 38 40 AB 32 35 37 O

Table of Contents

6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5

Table of Contents

2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Made to Order

5 6 6 6 6 6 9 18 17 22 22 26 26 34 41 6 7 9 8.5 11 11 14 16 5 6 6 6 6 6 8 9 5 5 5 5 5 5 6 6 20 25 32 40 50 63 80 100 120 119.5 139.5 139.5 160.5 160.5 190.5 200.5 0 0 15.5 9 16.5 11.5 8 10.5 24.5 24 34 27.5 37.5 32.5 35 35.5 57 56 70 63.5 78.5 73.5 84 74.5 80 93 110 118 146 160 199 236 87.5 87.5 103.5 103.5 119.5 119.5 141.5 161.5 MGPL, MGPA (Ball bushing bearing) A, E, HT Dimensions (mm)

Smooth Cylinder/Low Speed Cylinder

stroke (mm) Without auto switch With auto switch Bore size (mm) C D E F OA OB Q RA RB T H I K L M N A B A B 12 16 20 25 22 22 29.5 32.5 25.5 25.5 34 37.5 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 17 17 19.5 22.5 20.5 20.5 24 27.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0

Table of Contents

Y A J K B Y C D Misc.

Aluminum High Vacuum Angle Valve

D16 X65 XLA XSA Pilot port direction Seal material changed part Bonnet assembly XVD Symbol Nil Rear (as seen from body connection point) Left (as seen from body connection point) Right (as seen from body connection point) K M Pilot port direction Temperature 5 to 60C 5 to 150C XLG100-30-1-1 XLG100-30-1H-1 Part no.

Air Cylinder

B2 P G Width across flats B1 H1 Plug with fixed orifice NN Width across flats KA TY TD D E I MM F AL A K H + Stroke Width across flats NA TT S + Stroke TX TZ ZZ + 2 x Stroke Z + 2 x Stroke (mm) Bore size A AL B1 B2 D E F FL G H H1 I K KA MM NA NN P TD TT TX TY TZ 20 18 15.5 13 26 8 20 0 0.033 13 10.5 8 41 5 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 8 10 32 32 52 25 22 19.5 17 32 10 26 0 0.033 13

Table of Contents

5.

CA2

5 !6 !7 !8 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

round shaft CRJ XA40 Shaft through hole XA41 Shaft through hole CRA1 XA43 Shaft through-hole + Double shaft-end-female threads XA44 Shaft through-hole + Double shaft-end-female threads CRQ2 T, J, K T, J, K XA45 XA45 Middle-cut chamfer K K XA46 Middle-cut chamfer MSQ MRQ Combination Chart of Made to Order DChart 5.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Middle-cut chamfer K K XA46 Middle-cut chamfer MSQ MRQ Combination Chart of Made to Order DChart 5.

ISO Cylinder

6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 16 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 Bottom side mounting: Cl85RAF/Y B 20/25 Stroke (XB) G1 (WH) Width across flats SW EE EE 2 x LD G2 KK ND h8 NA NA B LH Width across flats K C AM NA NA LX L N2 N1 H 3 ZZ + Stroke S + Stroke Head cover axial port

Vacuum Unit

V Output impedance: Approx. 1 k FUNC Blue DC() ue DC() Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less FUNC Blue DC() Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 07 (1/4"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: P2 (Direction 2)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Size: 07 (1/4"), Pilot Port Thread: N (Thread Type 1/8"NPT)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 10 (ø10), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: P7 (Direction 7)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Size: 10 (ø10), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: P7 (Direction 7)