ISO Cylinder

0.03 J 0.04 J 0.09 J 0.27 J 0.4 J Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J Standard Strokes Air cushion Bore size [mm] Standard stroke [mm]*2*4 Max. stroke*3 [mm] 8*1 10, 25, 40, 50, 80, 100 100 10 12 10, 25, 40, 50, 80, 100, 125, 160, 200 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 500 25 Refer to pages 101 to 111 for cylinders with auto switches. *1 Not available with

Made to Order

-XC27 Note 1) The minimum order quantity includes 2 foot brackets and 1 mounting nut.

Modular F.R.L. Unit

Applicable models Description Symbol 1/8 20 8 Metal bowl with level gauge Thread type AFM30, 40 Port size Nil 3/8 30 C With bowl guard AFM20 Nil Rc 01 1/8 With bracket AFM20 to 40 B 1/2 J Note 1) 40 Drain guide 1/4 AFM30, 40 NPT N Note 1) 02 1/4 Float type auto drain (N.C.)

Battery-less

range1 65 Motor cable (2 x 5)5 [1] 1 E Stroke end [Origin]3 Origin2 65 [Stroke end] 180 (L) F 19.5 20 (2.2) Stroke (G 1) x H 21 B-B H 49 13.7 B 9.5 5.3 56 (37) G x M6 x 1 thread depth 12 6 B 5H9 (+0.030 0 ) depth 5 5H9 (+0.030 0 ) depth 5 J Connector Motor cable 1 This is the range within which the table can move when it returns to origin.

Table of Contents

1 !

Table of Contents

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

ZP3

Basic Type ZP Series Model Connection thread Tightening torque [Nm] ZP(2 to 8)(J/K)--A8 M8 x 1 1.5 to 2.0 ZP(10 to 32)(J/K)--A10 M10 x 1 2.5 to 3.5 ZP(40/50)(J/K)--A14 M14 x 1 6.5 to 7.5 Lock ring Adapter Compact Type ZP3 Series Model Connection thread Tightening torque [Nm] ZP3-(015 to 035)JM6 x 0.75 1.5 to 1.8 ZP3-(015 to 035)KM8 x 0.75 2.0 to 2.5 ZP3-(04 to 16)(J/JB/K)Pad 2.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

AC

Model Port size Q M B B A B C D P E F G H J K L 8, 1 4 1 AFM2000 AFM3000 AFM4000 AFM4000-06 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFM2000 AFM3000 SAC2000, #1 SAC2503, #1 AFM4000 AFM4000-06 SAC4000, #1 SAC4006, #1

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

2/3 Port Valve

IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5

Electric Actuators

C depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B Cross section C-C (mm) 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model 5.8 LXSHAB50--X LXSHAB75--X LXSHAB-100--X LXSHAB-125--X LXSHAB-150--X 1 3 10.5 6.5 3.3 6.5 T-slot A dimension T-slot B dimension Note) The overall

PSxx-OMR0001CN

-2No.PS-OMR0001CN-J 1 / 1 1.5 *3) *3)1 1 -3No.PS-OMR0001CN-J 1 SMC 100 1 -4No.PS-OMR0001CN-J 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4

NCA1

KK NCM 1/32 R NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK Bore size (in) 200 (2") 1 5 1/8 1 3 1.18 5 2.56 1 3/8 1 1/8 2.09 2.6 3 5/8 1 1/2 2.40 1 1/8 3.29 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1 1.26 1.06 1.84 3/4-16 250 (2.5") 1 5 1/4 1 3 1/2 1 1.18 5 1/2 3

NCA1

0 1 1/4 4 1/2 1/4 3/8-24 4 1/2 2 1 1/4 1/2 5/8 4.7 1 1/2 1 5/8 7 7/8 1-14 1 3/8 Oversized Rod-Rod Side Flange Style: NCA1F (XB5) P + Stroke Y C 2-EE (NPTF) 4-FB (Hole) AA D across flats KK B MM EA BA E R A W F G J 4-DD TF LF + Stroke WF ZB + Stroke UF Bore size (in) MM KK A AA B BA C D DD E EA EE F FB G J R TF UF W WF LF Y P ZB 200 (2") 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 7/8 5/16-24 2.5

High Vacuum Angle Valve

Dimensions XLC-100/160-1-X152: Air operated (b) D C E E C E Fn (KF flange) Fd (K flange) (a) (c) J H K [mm] Model A B C D E1 Fn Fd G H J K XLC-100-1-X152 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160-1-X152 138 339 200 65 11 190 180 153 124 62 12.5 B A 1 The E dimension applies when the heater option is included.

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

LX

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

NCA1

XA + STROKE P + STROKE Bore S E Y 200 3/4 2-EE (NPTF) A WF 250 3/4 KK C 325 1-1/16 400 1-1/16 AA EA B MM BA AE AT AH D ACROSS FLATS G DD J AL AO S 6 AB (HOLE) LF + STROKE AO AL FA SA + STROKE X119 Option (in) Bore (in) MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE FA G J S WF Y P LF SA XA ZA 200 (2) 1 3/4-16 1 1/8 2.6 3/8 2 11/16 1 7/16 1 9/16 1/8 1.5 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3