Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K 54 47 47 40 B LH LT LS LX LD 8 13 AL F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104

C85

{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 4.5 19 6 10.5 28 16 7 48(53) 104(109) 7(5.5) 11.5(13.5) 10 12 16 14 M6 x 1 M5 x 0.8 M16 x 1.5 6 19.7 18.3 17 5.5 24 5 8 9.5 38 22 10 52(54) 128(130) 8(5.5) 12.5(12.5) 12 16 16 14 M6 x 1 M5 x 0.8 M16 x 1.5 6 19.7 18.3 17 5.5 24 5 8 9.5 38 22 10 52(54) 128(130) 8(5.5) 12.5(12.5) 16 16 22 17 M8 x 1.25 G 1/8 M22 x 1.5 8 28 24 20 8.5

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

0.5

) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions Power supply cable IZS41-CP Part no.

Suction Guard (Produced upon receipt of order) FHG Series

104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 2 59 47 Station 15 306 294 3 78 66 4 97 85 5 116 104 6 135 123 7 154 142 8 173 161 9 192 180 10 211 199 11 230 218 12 249 237 13 268 256 14 287 275 Station L1 L2 361 5 Port Solenoid Valve 10-SYJ7000 Type 21: Top Ported/10-SS5YJ7-21Stations (-00) [ ]: AC Grommet (G) Directional Control Valves Air Grippers Modular F. R.

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

MLGC

19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N S GD I K L M Q R P 20 25 32 40 4 4 5.5 M6 X 1 3.5 60 25 26 54 M8 X 1.25 depth14 35 80 105 50 93 12 M5 X 0.8 MGP 7 7 9 4 70 32 31 62 40

SYJ3000/5000/7000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 43 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-

Table of Contents

113 4 87 96 3 70 79 2 53 62 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8

VZS

113 4 87 96 3 70 79 2 53 62 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

Series H, DL, L, LL Self-align Fittings

Male elbow Bulkhead union P. 104 DL Use to pipe at right angle to female thread portion. Most general type. P. 105 DE Use to junction connection of tubes for panel. Union tee Bulkhead connector P. 104 DT Use to branch connection of tubes of both sides 90 direction. P. 105 DEF Use for transit connection of a tube and a male screw on panel.

Thermo-chiller

Contact circulating uid supplier for details. 104 (40) 0.99 4.18 x 103 0.99 1 x 103 15% Ethylene Glycol Aqueous Solution 24 Series HRS100/150 Specic Product Precautions 1 Be sure to read this before handling. Refer to the back cover for Safety Instructions.

TABLE OF CONTENTS

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

Vacuum

L3 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (120\ 5.35 (136) 5.98 (152) 6.61 (168) 7.24 (18/.\ 7.87 (2001 Millimtef in parentheses 53 C Single-Stage Nozzle (o1.5) . Produces high suction flow with quick response time. . Interchangeable with all other nozzleldiffuser ass'ys.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 78 66 6 135 123 8 173 161 10 211 199 2 59 47 4 97 85 5 116 104 7 154 142 9 192 180 11 230 218 12 249 237 13 268 256 14 287 275 15 306 294 1.2-66 Series SYJ7000 21 Type Manifold: Top Ported/SS5YJ7-21Station Grommet(G), (H) Manual override 4-4.5 (Mounting holes) Depress and turn to operate and lock override.

Vacuum

(station 4) Noter Order lett to right (station 1-10) facing tension bolt & filter cover 52 IIIZM $erie Manifold Dimensions inch (mm) NZZM05-T068 n: stations L1 1 .73 @4\ 2.36 (60) 2.99 (76) 3.62 (92) 4.2s (108) 4.88 (124) 5,51 (140) 6.14 (156) 6.77 (172\ L2 2.20 (56) 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (1201 s.35 (136) 5.98 (1s2) 6.61 (168) 7.24 (18r'.\ L3 2.83 (72\ 3.46 (88) 4.09 (104) 4.72

76

F (C) Correction factor 58.0 (0.4) 0.9 1.06 72.5 (0.5) 36 to 77 (2 to 25) 0.93 1.02 87.0 (0.6) 86 (30) 0.96 1 101.5 (0.7) 90 (32) 1 116 (0.8) 0.99 95 (35) 1.03 130.5 (0.9) 0.98 104 (40) 1.06 145 to 232 (1 to 1.6) 0.92 113 (45) 1.09 1 Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140F (60C) (Max. ambient

Battery-less

LEYG), Ball screw (LEYGD) Guide type Sliding bearing (LEYGM), Ball bushing bearing (LEYGL) Operating temp. range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size m28 m42 m56.4 m56.4 Motor type Battery-less absolute (Step motor 24 VDC) Encoder Battery-less absolute Power supply voltage [V] 24 VDC 10% Power [W]*8 *10 Max. power 43 Max. power 48 Max. power 104