•

fl tube (mm: N6 (Nylon tube ~/4) 16.5 7 2,5 I P Q, R 'U6 ($Oft IIj).'>'6!

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Electric Actuator with Integrated Guide

P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E

CL

Bore size Lock operation 16 16 mm E P D Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Standard stroke (mm) Port location on head cover Nil R Perpendicular to axis Axial direction Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

39

Q R K L M N O P Q Part no.

7ND9071en

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

Vacuum System Peripherals:

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.

REA/REB

D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

REA/REB

F2 D 1.6 x ---P F3 D 1.6 x ---P F1 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 10-2-18.)

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Same side 75 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-B59W Same side 75 115 115 115 130 140 150 1 pc. 15 Different sides 35 80 80 95 2 pcs.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

The minimum stroke with rod boot is 20 mm. 6-5-61 62 Series CBG1 Air Cushion Type: CBG1BA Stroke Bore size H Bore size Rod end lock: CBG1BA Stroke R Head end lock: CBG1BA WA WB 2-P W 10 Max.

AC

ITV VBA Simplified pilot circuit VE E-P HYREG VY R G Application examples Capable of performing multistage pressure control and stepless pressure control by varying the electrical signals.

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

REA/REB

First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination W D 1.6 x P High Precision Guide Type REAH W W > WV P > PV Determination of allowable load weight & pressure Inclined operation (Refer to page 75 for vertical operation.)

IDG

100 Nil None (Standard) P With fitting for purge air discharge 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 S With dew point indicator R Flow direction (Right Left) 5 Standard equipment 10 20 30 50 60 75 100 Note) In the case of two or more options, indicate them alphabetically.

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

R.

Table of Contents

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.