Table of Contents

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Table of Contents

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Electric Actuators

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Lead screw lead N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

Table of Contents

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Table of Contents

VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Table of Contents

Model A T KKA3S-01M R 1/8 18.8 38.5 34.1 38.1 -02M R 1/4 6.1 41.8 35.1 41.1 1/8 18.5 17 20.1 -03M R 3/8 46.3 35.6 42.1 D K KKA4S-02M R 1/4 31.3 76.8 40.0 46.0 -03M R 3/8 8.1 78.5 40.5 47.0 1/4 24.2 22 M 32.8 -04M R 1/2 86.6 42.0 50.0 H KKA6S-03M R 3/8 11.0 58.0 149.1 44.9 51.4 H L -04M R 1/2 160.4 46.4 54.4 1/2 30.7 30 11.4 59.5 -06M R 3/4 184.8 46.9 56.4 D Female thread type (mm) Body size

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Made to Order

Front mounting flange 63 to 100 B HS C View C-C' D D' C' HU R A Y + Stroke View D-D' MGC Series MGC series 20 to 50 (mm) Width across flats HT Reinforcing bracket Mounted in case of 301 mm or longer strokes.

ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

LJ1H

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

Hydraulic

Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Description Manifold block assembly q For D side P/R port with One-touch fitting for 6 For U side P/R port with One-touch fitting for 6 VZ1000-2A-2D SUP/EXH block assembly D side w VZ1000-2A-2U SUP/EXH block assembly e DIN rail End block assembly End block assembly VZ1000-3A-1D For D side For U side Without D-sub connector For indicated location, P/R port with One-touch fitting for 6 r VZ1000

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

Table of Contents

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Electric Actuator/Slider Type

0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.