Bore Size: 12mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Function: Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 5m, Number: -

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 1m, Number: -

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 50mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 50mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 50mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers)

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, 0.5M, Lead Wire or Prewired Connector: L (3m)

Table of Contents

Threaded type from 6A to 50A is standardized.

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

2/3 Port Valve

) Brass or BC6, Copper Polyacetal B H X Stainless steel Note 1)15A to 25A are brass and 32A to 50A are BC6 Note 2)The highest operating temperature of 32A to 50A is 80C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Metric size Inch size 3 SY3000 5 SY5000 7 SY7000 9 SY9000 Rc Nil 5 32" F G One-touch fitting for 4 VVQ1000-50A-C4 VVQ1000-50A-N3 One-touch fitting for SY3000 SY3000 1 4" N VVQ1000-50A-N7 One-touch fitting for 6 VVQ1000-50A-C6 NPT One-touch fitting for 5 32" NPTF T One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-51A-N3 One-touch fitting for A, B port size SJ Except for M5 1 4" One-touch

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

VXP21/22/23

Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

7.4

Applicable tube 2 VVQ0-50A-C2 Applicable tube 3.2 VVQ0-50A-C3 Applicable tube 4 VVQ0-50A-C4 Applicable tube 1/8" VVQ0-50A-N1 Applicable tube 5/32" VVQ0-50A-N3 8.5 mm pitch (One-touch fitting) PR plate Barb fitting 2 SS070-50A-20 Barb fitting 3.2 SS070-50A-32 Barb fitting 4 SS070-50A-40 * Part number is for one fitting assembly.

SX

One-touch fitting for 4 Metric size SX3000 VVQ1000-50A-C4 VVQ1000-50A-C6 One-touch fitting for 6 One-touch fitting for 4 SX5000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" Inch size Fitting assembly SX3000 VVQ1000-50A-N3 VVQ1000-50A-N7 One-touch fitting for 1/4" One-touch fitting for 5/32" SX5000 VVQ1000-51A-N3 VVQ1000

Series SV

Clip Fitting assembly part numbers SV1000 SV2000 Port size 3.2 One-touch fitting VVQ1000-50A-C3 4 One-touch fitting VVQ1000-50A-C4 VVQ1000-51A-C4 6 One-touch fitting VVQ1000-50A-C6 VVQ1000-51A-C6 P B B B A, B port P, E port B 8 One-touch fitting VVQ1000-51A-C8 Fitting assembly N1 One-touch fitting VVQ1000-50A-N1 N3 One-touch fitting VVQ1000-50A-N3 VVQ1000-51A-N3 N7 One-touch fitting VVQ1000

Process Valve

Screw-in type (6A to 50A) and the flange (32F to 50F) are standardized.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.