Series: Standard w/ Magnet, Mounting: MX0, Basic, Bore Size: 1 1/2", Stroke: 24", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Short Female, Threaded, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Clean Gas Filter

Clean Gas Filter SF Series Cartridge Type/Disposable Type HAA HAW AT Disposable type IDF IDU SFC10 IDF FS IDFA IDFB IDH ID IDG IDK AMG Cartridge type AFF SFA10 SFA20 SFA30 AM AMD AMH AME Disposable type SFB30 AMF ZFC SF SF SFD LLB AD GD Cartridge type SFB10 SFB20 295 SMC Clean Gas Filter (SF Series) SMC Clean Gas Filter (SF Series) Integrated production in a clean environment Under a clean

EXxx-OMW0014CN

SF LED/BF LED . 6-3 SF LED/BF LED SF BF OFF OFF SI (IO ) US1 (DC19.2 V ) ON --IO Device name IP GSD IO --ON (1Hz) SI FW SI Web SF ON SF OFF BF OFF BF ON (1Hz) SI FW SF ON SF OFF BF ON BF OFF 6.4.2. US1 LED . 6-4 US1 LED US1 OFF US1 OFF (1 Hz) US1 ON (DC19.2 V ) ON US1 ON 6.4.3. US2 LED . 6-5 US2 LED US2 OFF US2 OFF ON US2 ON 41 No.EX-OMW0014CN-A 6.4.4.

Series: NCDA1 (Standard w/ Magnet), Mounting: F (MF1, Front Flange), Bore Size: 400 (4"), Stroke: 0600 (6"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: SF (Short Female, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: MDPC (1.0m Cord Length, M12-4 Pin Connector)

Series: NCDA1 (Standard w/ Magnet), Mounting: F (MF1, Front Flange), Bore Size: 400 (4"), Stroke: 0100 (1"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: SF (Short Female, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

EXxx-OMN0027CN

SF BF: () (PLC) LED 27 PROFIBUS DP SF: BF PROFIBUS DP 11 SF BF SI 0126 1~125 SF BF PLC SF: BF SI PLC V_SEL PLC SI PWR LED DC24 V+10/-5 SI ~ SI 12 SI EX600-SPR1A (PNP ) EX600-SPR2A (NPN ) SI SI -49No.EX-OMN0027CN-D No. (PNPNPN) SI PWR LED DC24 V10% 13 (PNPNPN) SI PWR LED DC24 V+10/-5 PLC -50No.EX-OMN0027CN-D No.

Clean Air Module

AME AMF ZFC SF SFD LLB LLB AD GD 349

EXxx-OMU0020CN

EX245-SPN1 . 12-1 No. 1 LINK LED ACT LED SI Ethernet 2 BF LED PROFINET IO Port1/2 (XF1/2) SI Ethernet Ethernet -3 BF LED SI SI SI Device name Device name PROFINET PROFINET SI / . 12-2 SF LED No. 1 SF LED 2 Hz PROFINET 2 SF LED 0.5 Hz PROFINET / PROFINET SI Device name (GSD EX245 PN FX) (GSD EX245 PN Cu ) Valves 3 SF LED 4.1.

Refrigerated Air Dryer

SF Construction (Air/Refrigerant Circuit) SFD Hot and humid air entering the air dryer is cooled down by the cooler re-heater (heat exchanger). The moisture which is condensed and separated is automatically exhausted by the auto drain.

Suction cups with flange

ZP3PG20JT2SF-7A-X2 21 ZP3P-20JT2SF-W ZP3PA-T1JT-7A-X2 ZP3P 20 JT2 SF M ZP3PG20JT2SF-M-7A-X2 21 ZP3P-20JT2SF-WM ZP3P 32 JT2 SF ZP3PG32JT2SF-7A-X2 48 ZP3P-32JT2SF-W ZP3PA-T2JT-7A-X2 ZP3P 32 JT2 SF M ZP3PG32JT2SF-M-7A-X2 48 ZP3P-32JT2SF-WM ZP3P 20 JT5 SF ZP3PG20JT5SF-7A-X2 23 ZP3P-20JT5SF-WG ZP3PA-T1JT-7A-X2 ZP3P 25 JT5 SF ZP3PG25JT5SF-7A-X2 25 ZP3P-25JT5SF-WG ZP3P 32 JT5 SF ZP3PG32JT5SF-7A-X2

Table of Contents

The spacing (l ) of the support must be no more than the values shown in the graph on the right. 200 190 (kg) m 180 170 160 l 150 140 (2400) (2400) (2400) (2400) (2400) (2400) 130 120 Weight (m) m l 110 Caution 100 (2000) (2000) (2000) (2000) (2000) (2000) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SF AV AU BB (Max. approx.

Rotary Table/

SF AV AU BB (Max. approx.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

EXxx-OMQ0015CN

LED PLC ON/OFF 8 ST(M) () ST(M) SI 9 ST(M) PWR () DC24 V10 10 PWR(V) () DC24 V+10/-5 :(66 ) -31No.EX-OMQ0015CN No. 1 PROFINET L/A IN L/A INL/A OUT LINK L/A INL/A OUT OUT L/A OUT 11 PLC PLC RUN L/A INL/A OUT LINK SF BF () LEDNo.27 SF BF PLC 12 PLC OFF PLC SI PLC SI Device Name SF BF PLC SI PWR(V)LED DC24 V+10/-5% SI SI 13 SI EX600-SPN1(PNP) EX600-SPN2

EXxx-OMY0006CN

SF LEDBF LED Table 10-19 SF / BF LED SF BF SI SI Device name IP GSD -PROFIsafe SI F(2Hz) --(0.5Hz) --(Acknowledgement) (Commissioning Mode ) --10.9.1.2. US1 LED Table 10-20 US1 LED US1 US1 17V US1 17V20.4V US1 (21.6V ) 10.9.1.3.

0.01

0 Replacement Parts SF No. Description Note Material Element set 1 SFD-EL200 With 3 O-rings SFD SFD LLB Component Parts AD SFD200-02 No. Description Note Material GD Element 1 PC, Polyolefin, PU i !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Refer to Minimum Stroke for Auto Switch Mounting on page 6-9-8. 2001 to 2400 30 30 55 325 331 347 2001 to 2400 36 36 55 390 357 372 The minimum stroke with rod boot is 30 mm or more. 6-9-14 15 Series CS1 Air Cylinder Head Side Flange Style: CS1G Lube (CS1G), Non-lube (CS1GN), Air-hydro (CS1GH) Width across flats KA With rod boot CJ1 CJP S + Stroke ZZ + Stroke CJ2 ZZ1 + l + Stroke CM2 CG1

CS1

or less 300 1200 or less 2400 or less Second Class Pressure Vessel Rod Boot Materials Symbol Material Max. ambient temp.

Vacuum Pad

B5 Pad diameter Symbol Pad diameter 20 20 25 25 35 35 50 50 Vacuum inlet Pad material Symbol Connection 20, 25 35, 50 Female thread B5 M5 x 0.8 V B01 Rc1/8 V Symbol Material SF Silicone rubber Complies with the FDA (USA Food and Drug Administration) 21CFR177.2600 elution test.