PF3A7xxH-L.eng

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

HRX-OM-W038

6000 Ambient Ambient temperature temperature 5000 5000 or or Cooling capacity[W] facility water temperature Cooling capacity[W] facility water temperature 4000 4000 3000 25 25 3000 32 32 40 40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and

HRX-OM-O021

6000 or or facility water facility water 5000 5000 temperature temperature 4000 4000 25 25 3000 3000 32 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500

HRX-OM-R005

6000 temperature temperature 5000 5000 25 25 4000 4000 32 3000 3000 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2

Modular F.R.L. Unit

6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC40 Rc 1/2 Specific Product Precautions 0.6 0.5 Outlet pressure MPa Mounting and Adjustment Air Supply 0.4 Caution 1.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Delivery Pressure: P [50 to 6000 psig (0.34 to 41.4 MPa)], Relieving: 1 (Self-relieving, Standard), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 60 [6000 psig (41 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material

Delivery Pressure: P [50 to 6000 psig (0.34 to 41.4 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 60 [6000 psig (41 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®,

Delivery Pressure: P [50 to 6000 psig (0.34 to 41.4 MPa)], Relieving: 1 (Self-relieving, Standard), Material: B (Brass), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 60 [6000 psig (41 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: VitonÂ

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 Thermal type Air N2 1 L/min 10 100 (Thermistor) 2 L/min 20 200 5 L/min 50 500 PF3A H(-L) 30 3000 Body ported type 2 L/min Thermal type (Platinum sensor) 6000

3

L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000 300 6000

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

NAAMS Standards Compliant

6000 0.8 MPa 0.5 MPa 0.8 MPa 0.5 MPa 4000 4000 0.3 MPa 2000 2000 0.3 MPa 0 50 100 150 200 250 300 0 50 100 150 200 250 300 Arm length [mm] Arm length [mm] Bore size: 63, Arm length: 200 mm, Operating pressure: 0.5 MPa With an arm length of 200 mm and an operating pressure of 0.5 MPa, according to the graph, the maximum clamping force is 2000 N.

Power Clamp Cylinder

Recommended shim thickness) Arm length L: 8 in 0.08 0.04 0.12 For Asia For North America For Europe For France Special 800 Clamping force (lbf) 0.7 MPa 600 0.5 MPa 0.3 MPa 400 200 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 80 Arm length L: 250 mm 7000 6000 5000 4000 3000 2000 1000 0 Clamping force (N) 0.7MPa 0.5 MPa 0.3 MPa 0 1 2 2.5 3.5 3 4 5 6 7 8 9 Shim thickness (mm) (Ex.

NCA1

Example: 3) From Table 2, determine Stop Tube Requirements ~ 1) From Table 1, determine Stroke Factor (SF) ~ NCDA1L800-6000-XTATCDN Find L length and note Stop Tube length Stroke Factor 2.0 8 Bore Stop Tube Length = 8 60 Stroke 2) Determine Effective Length L MS1 Mount L = Stroke x Stroke Factor Supported but not rigidly guided = 60 x 2.0 = 120 inches 21 Engineering Specifications Expanded

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard Stroke Bore size (mm) Standard stroke (mm) Manufacturable Note) maximum stroke (mm) 6 300 50, 100, 150, 200 10 500 50, 100, 150, 200, 250, 300 50 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 6000 63 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

Table of Contents

Standard Stroke Bore size (mm) Standard stroke (mm) Manufacturable Note) maximum stroke (mm) 6 300 50, 100, 150, 200 10 500 50, 100, 150, 200, 250, 300 50 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 6000 63 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

Electric Actuator/Slider Type

Positioning pin (Mounting reference plane) Model Distance LEFS25 H 4100 km LEFS25 A 2500 km LEFS25 B 1200 km Model Distance LEFS32 H 6000 km LEFS32 A 4000 km LEFS32 B 2000 km Positioning pin (Mounting reference plane) Positioning pin (Housing B bottom) Model Distance LEFS40 H 6000 km LEFS40 A 4000 km LEFS40 B 2000 km Body mounting reference plane Positioning pin The traveling parallelism

90

Annual cost reduction effect [Calculation conditions] Electric power cost: 1.55 yen/m3 [Work model] Working hours: 6000 h (250 days/year) Supply pressure: 1.0 MPa Set pressure: 0.2 MPa Comparison between IR3000-A and the current IR3000 Comparison between IR1000-A/IR2000-A and the current IR1000/IR2000 300 300 Annual cost of power consumed by compressor [1000 yen/year] 250 250 When 20 units

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

For Air (Orifice diameter: 10 mm, 15 mm, 20 mm, 25 mm) How to read the graph The sonic range pressure to generate a flow rate of 6000 L/min (ANR) is as follows.