CY1

Model Symbol 10 High speed specification rodless cylinder CY1B25 6 -X160 CY1B32 7.5 CY1B40 8.5 Magnetic holding force CY1B50 9 CY1B X160 Bore Stroke CY1B63 9 CY1B dimensions are the same as the standard type. High speed specification rodless cylinder Makes possible high speed piston drive of 1500mm/s (without load).

Electric Actuator/Slider Type

LEY63 T8 (Motor mounting position: Top/Parallel, In-line) 787 [3500] 674 [3000] Lead 2.86: LEY63 L (Top/Parallel only) 562 [2500] Force lbf [N] Lead 5: LEY63 C 450 [2000] 337 [1500] Lead 10: LEY63 B 225 [1000] 112 [500] Lead 20: LEY63 A 0 10 12 20 30 40 50 Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 20 or less 100 100 (60)

Ionizer

Bar length (mm) 300, 380, 620, 780 1100, 1260, 1500 1900, 2300 661 A Series IZS31 Dimensions Feedback sensor/IZS31-DF Amplifier part Head part 2 x 3.4 2 x 3.4 3500 1500 16.6 13 SMC 9 58 25 4.8 10.2 69 15 4.8 23 8 87.5 78 0.5 11 13 6.5 7.8 8.8 8.8 0.5 10.2 10.2 13 60 7.7 7 6 1 50.5 14 Detection hole 10 61 2 x R3.3 Autobalance sensor [High-precision type]/IZS31-DG Amplifier part Head part 2

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

KT10

series Vespel (Option: PEEK) PCTFE Viton (Option: Polyurethane, Buna-N, Ethylene propylene) PTFE C 300 SS series 316 SS Wetted Parts Body Inlet filter Piston and trim Seat, main valve Seat, vent valve O ring Rings, back up Dimensions Flow Characteristics inch (mm) KT10 2.25 (57.2) KT10 6000 psig (41.4 MPa) inlet 1500 psig (10.3 MPa) inlet Inlet pressure: 3000 psig (20.7 MPa) inlet 4000 27.6 3500

HRX-OM-R016

3500 temperature temperature or or Cooling capacityW Cooling capacityW 3000 3000 facility water temperature facility water temperature 2500 2500 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

SL5200

Vespel is a registered trademark of DuPont. 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 25 Single Stage Regulator for Ultra High Purity Low flow Series SL5500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option

AP64

4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch tube weld No code M X MV4 FV4 TW4 MV6 FV6 TW6 Specifications Operating Parameters Gas Inlet pressure Cracking pressure 1) Maximum backpressure Proof pressure Burst pressure Ambient and operating temperature Cv AP64 Select compatible materials of construction for the gas Vacuum to 3500

AP10PA

Pneumatic Actuation Pressure Regulator Low flow Series AP10PA Actuation control pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with

Vacuum System Peripherals:

Flow capacity (l/min (ANR)) Oil mist concentration at outlet side 300 750 1500 2200 3500 Filtration (m) Port size Rc Model AM150 AM250 AM350 AM450 AM550 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) , , , , , , , , , 1 1 0.3 1 2 3 4 3 4 1, 1 2 1 , 2 AM650 6000 AM850 12000 1 2 Can produce with auto drain type, drain piping type.

Flow Rate: 3500 scfm, Flange Size, ANSI ISO#: 6", Filtration Grade: 1 Micron

Flow Rate: 3500 scfm, Flange Size, ANSI ISO#: 6", Filtration Grade: Activated Carbon

Flow Rate: 3500 scfm, Flange Size, ANSI ISO#: 6", Filtration Grade: 5 Micron

Flow Rate: 3500 scfm, Flange Size, ANSI ISO#: 6", Filtration Grade: 0.01 Micron

AFF

Option)/For AFF75A to AFF220A AFF75A AFF125A AD402-03-2 G46-15-02 AFF150A AFF220A Applicable model Auto drain (2 pcs. each) Pressure gauge (2 pcs. each) Companion flange (2 pcs. each) Anchor bolt (3 pcs. each) AI-2S 2BJIS 10KFF 3BJIS 10KFF 4BJIS 10KFF Model AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Note) Rated flow (l/min (ANR)) 300 750 1500 2200 3500

AMD

AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AME

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Model Note) Rated flow (l /min (ANR)) 300 750 1500 2200 3500 6000 12000 Port size (Nominal size B) , , , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.