•

l % M5 M6 i M8 Ye I M4 1MS M6 , M8. li ZPT02 2.5 3.5 ~~112.5 3.5 \ '(~i~ ~ ~ 1-\ ZPT08 (3.5) (3) H 1""'2., "2,'~) {:~~.:) zpno 10 12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

Table of Contents

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

LX

) 28 36: T-slot pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Connector C JXC92 JXC73/83/93 Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) LE CP 1 1 2 A6 B6 (30.7) Connector A 15 16 Connector D (14.7) L (11) Cable length (L) [m] (10) 1 1.5 3 3 5 5 8 8*1 A 10*1 B 15*1 C 20*1 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3

Tie-rod Type Hydraulic Cylinder

25 92 233 106 11 50 10 9 3/8 43 30 10 73 225 60 28 99 251 112 11 1/4 stroke 63 12 10 3/8 47 37 10 80 243 65 30 106 269 116 11 80 16 13 1/2 57 40 13 90 270 80 32 116 296 127 11 100 20 16 1/2 66 47 13 100 297 100 35 123 322 137 12 1/5 stroke 125 20 16 1/2 77 55 15 100 307 100 35 123 328 137 12 160 24 20 3/4 94 60 20 108 343 120 38 131 366 155 12 401 CHA Series Dimensions Rod flange type: CHAF

Table of Contents

AXT100-DR-11 AXT100-DR-13 AXT100-DR-15 AXT100-DR-17 AXT100-DR-19 AXT100-DR-22 AXT100-DR-24 AXT100-DR-26 AXT100-DR-28 AXT100-DR-31 148 173 198 223 248 285.5 SMC SMC 310.5 K K P P C C U U O O S S H H L L 57 53 51 335.5 33.5 360.5 18 IN OUT IN OUT IN 398 14-4-29 12 Compact Manifold Regulator Individual Supply Type Series ARM11B How to Order ARM11B 1 A 1 1 Z 06 A 1 2 3 4 5 6 7 1.

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

7ND9071en

Check details of marking from N E2 ATEX and IECEx certifications: II 1 G Ex ia IIC T6...T4 Ga II 2 G Ex ib IIC T6...T4 Gb II 1 D Ex ta IIIC T90 C Da II 2 D Ex tb IIIC T90 C Db II 1 D Ex ia IIIC T90 C...T120 C Da II 2 D Ex ib IIIC T90 C...T120 C Db Temperature range: T4: -40 to +80 C; T5: < +65 C; T6: < +50 C.

Modular F.R.L. Units

Nr c Pressure unit of the scale plate Nil MPa P2 MPa/psi dual scale + Center of F.R.L. body D A d Mounting position Nil Right R Left Model 1 Port size A B C D E Applicable model IS10E-20l01-A 1/8 29.8 66.3 55.3 28 16 AC20l-B IS10E-20l02-A 1/4 IS10E-20l03-A 3/8 IS10E-30l02-A 1/4 31.8 72.8 58.8 30 13 AC25l-B, AC30l-B IS10E-30l03-A 3/8 IS10E-30l04-A 1/2 IS10E-40l02-A 1/4 1 Set pressure range

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

MNB

8 11 11 13 16 46 52 65 75 95 114 97 104 120.5 134.5 169 189 1/8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

C EU W B F BA H K J S SU Model l M8 x 1.25 depth 8 144 (177) 5 0 0.030 9 CRA1BSU50 8.5 62 1/8 15 17 M16 x 1.5 45 17 25 11 14 98 15 46 12 48 2.5 36 5 25 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x 1.75 depth 14 163 (201.5) 6 0 0.030 11 CRA1BSU63 10 76 1/8 17 20 M20 x 1.5 54.5 19.5 30 13 18 117 19 57 14 60 2.5 41 5 30 186 (230) 6 0 0.030 13 CRA1BSU80 12 92 1/4 20 23.5 35 M24 x 1.5 62.5 22.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Battery-less

6 C !9 u C i y @5 q #1 @4 !1 !4 o !8 @6 !3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B F H1 C M N BN AL B K A S + Stroke M H ZZ + Stroke With rod boot l 10.2 h + l ZZ + l + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25

MNB

9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

MNB

thread length (mm) Width across flats 32 40 50 63 80 100 A 22 30 35 35 40 40 B 54 63 75 90 102 116 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 GA GC 45.5 52.5 58.5 68 81 96 Ee11 30 35 40 45 45 55 GB 13 14 15.5 16.5 19 19 GF 18.3 19.5 22.4 20.7 26 26 GL1 12 12 15 12 18 20 GR 4

0.4

Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

Cylinder with Lock

Improved holding force Improved by up to 15% compared with the C(P)95N series Improved holding force [N] Bore size [mm] C(P)96N C(P)95N Increase rate [%] 32 630 552 14 40 980 882 11 50 1570 1370 15 63 2450 2160 13 80 3920 3430 14 100 6080 5390 13 CP96N Series 1 Cylinder with Lock CP96N/C96N Series emergency stops, and drop prevention Compact auto switches are mountable.