Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: NPN; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: NPN; Out 2: Analog 4 to 20 mA, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Modular F.R.L. Units

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Label (Display item), Set value (Threshold value) Sub screen Set value (Threshold value) Hysteresis value Visualization of settings Peak value Bottom value Delay time Piping Applicable fluid Series Output type Enclosure Copy function 1/4 (R, NPT, G) (URJ1/TSJ2) M5 female thread 1/8 (R, NPT) ZSE20(F)/ ISE20 1 output IP40 p. 9 ZSE20A(F)/ ISE20A 2 outputs Analog output (Voltage/Current) IP40

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

SMC Electronic Switch Series Variations

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5

CM2

, 32, 40 Material of piston rod and rod end nut Max. operating pressure 1.0 MPa Min. operating pressure 0.05 MPa Nil -XC6 Carbon steel Stainless steel Cushion Rubber bumper Water resistant type Piping Screw-in type R V NBR seals (Nitrile rubber) FKM seals (Fluoro rubber) Piston speed 50 to 750 mm/s Auto switch can be mounted.

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)