Table of Contents

D-F7WV D-F79F D-A7H D-A80H D-F7 D-J79 D-F7W D-F7BAL D-J79W D-F79F D-F7NTL DD-M9 D-M9V D-F7V D-A7 D-A80 D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-A73C D-A80C D-A79W D-A9 D-A9V Bore size (mm) D-A7 D-A80 D-F7WV D-F9WV D-F9BAL -X D-F9BAL D-F9WV D-F9W 20Data B A B A B A B A B A B A U U U U U U U U U 12 16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Description Manifold block assembly q For D side P/R port with One-touch fitting for 6 For U side P/R port with One-touch fitting for 6 VZ1000-2A-2D SUP/EXH block assembly D side w VZ1000-2A-2U SUP/EXH block assembly e DIN rail End block assembly End block assembly VZ1000-3A-1D For D side For U side Without D-sub connector For indicated location, P/R port with One-touch fitting for 6 r VZ1000

Proposals for Energy Saving

H2 H1 L2 L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17 22 22 27 27 36 21.4 21 31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1 49.6 47.8 62.8 17.4 17 25.4 25 24.5 24.1 21.1

VS 8-2/VS 8-4

Nil B Push type Locking type (Tool required) CE compliant Internal/External pilot Nil Q CE compliant Nil R Internal pilot External pilot 27 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Dimensions (F kit) VV801--FD-W1-M 2 x 1/2" 3(R) port L1 = 19 x n1 + 27 x n2 + 85 L2 = L1 + 17 2 x 1/8" Pilot port n1: Piece of Size 18 mm n2: Piece of Size

Rotary Actuator/Vane Type

3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

R.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10-D CDRBU2W15, 20, 30-D (Figures below show size 20 actuators.) 2 x M3 x 0.5 through 2 x 3.5 through 2 x 3.5 through 17 2 x S2 2 x S1 10.5 B port A port 0.5 9 2 x S1 2 x S1 3 2 x M5 x 0.8 (Connection port) 10.5 2 x 3.5 through A port B port 2 x R D-90 ,D-S99 D-90A ,D-T99 3 D-97 D-93A (3m) 0.5m 18.5 2 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

VK3000

D LED R R NL Markings For AC, 12 VDC or less For 24 VDC or more + 1 2 1 2 1 2 NL: Neon light R: Resister LED: Emitting diode R: Resister D: Protective diode LED: Emitting diode R: Resister 1429

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

5 Port Solenoid Valve Series SQ1000/2000

D Note 1) C Note 2) Note 1) Except double (latching) Note 1) The function symbol is D for double solenoid specifications.

VK3000

VK VZ NL: Neon light R: Resister LED: Emitting diode R: Resister D: Protective diode LED: Emitting diode R: Resister VF DIN terminal Light/Surge Voltage Suppressor VFR Caution VP4 Grommet type (G) Rated voltage DIN terminal (D) Part no. symbol W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light VZS Caution S VFS Markings

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

MQQ

MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x

MQQ

MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Order with the option symbol -D to specify DIN rail mounting style.

MQQ

D D Note) Be sure to use a flat washer for the A type mounting. b) B type mounting (when using the cylinder tube threads) E t E t Compatible mounting bolt dimensions Model A type mounting B type mounting C (mm) D: Bolt length (mm) Mounting bolt size E (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D M4 x 0.7 35 + Stroke

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !