4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

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-fl Seies

i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !

Process Pump

1/8" 10 PA PB (270) 249 AIR SUP Rc, NPT, G 1/4" FLUID OUT Rc, NPT, G 3/4" 195 166 157 82 110 51 18 FLUID IN Rc, NPT, G 3/4" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) Tube extension: PAF5410P19 P19N P19F 204 10 255 120 4 x 9 (270) 249 43 AIR SUP Rc, NPT, G 1/4" 10 Reset button Air operated reset port Rc, NPT, G 1/8" (19.05) (15.85) FLUID OUT 3/4" tube extension Straight part 40 82

Dual Speed Controller with One-touch Fitting Series ASD 1

-07S 48.7 25.6 13.2 93 20.3 18.5 5/16" ASD530F-N03-09S 51.3 28.2 46.9 NPT 3/8 35.3 19 19.8 23 15.2 14 41.9 46.5 41.5 40.3 3/8" ASD530F-N03-11S 102 54.1 64.3 23.1 25.9 21 32.6 18.5 42.1 26.5 28.6 3/8" ASD630F-N04-11S 180 18.6 57.6 50.1 NPT 1/2 49.6 23.8 64.8 57.3 Reference dimensions of U10/32 and NPT threads after installation. 15-9-17 5 Series ASD Construction ASD530F-02 ASD230F ASD330F

ASD

17 13.2 48.7 25.6 20.3 93 5/16" NPT3/8 ASD530F-N03-09S 18.5 15.2 51.3 28.2 41.9 46.5 35.3 41.5 14 46.9 40.3 19 23 19.8 3/8" 102 ASD530F-N03-11S 54.1 23.1 21 18.5 32.6 NPT1/2 57.6 42.1 50.1 18.6 3/8" 180 49.6 23.8 64.3 ASD630F-N04-11S 57.3 28.6 26.5 25.9 64.8 Reference dimensions of M5 X 0.8, R(PT) thread after being screwed in. 4.1-16 Series ASD Construction ASD230F ASD330F/430F ASD530F/

New

Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Direct Solenoid

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PF2x2.eng

PF2W520 PF3W520 PF2W540 PF3W540 PF2W511 PF3W511 PF2W504 PF3W504 Function selection mode Safety Instructions Other functions Sensor connector Mounting and Installation PF2D2 series Lever Warning Installation or Channel scan function Peak / Bottom value display Key-lock function PF2D520 PF2D540 PF2D504 Do not disassemble, modify (including changing the printed circuit board) or repair.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18

VQ5000

H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18

P

Speed Controller/In-line Type AS2000-N02-X800/AS3000-N03-X800/AS4000-N04-X800 P .G. information Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -