CA2

boot 2-P (Rc, NPT, G) 4-LD G G 4-J 2-cushion valve MM B1 Width across flats KA FV FY E D B e H1 AL B C f h + l l H A F N K N 9 FT S + Stroke FZ FX ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B FV FD FX FY C AL B1 D E F FT FZ G H1 J Without rod boot With rod boot Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

3 Port Air Operated Valve Series SYJA300 1

Also, take measures to prevent ingress of water and foreign matter from the breathing port of the diaphragm. 5-5-10 1 3 Port Air Operated Valve Series VGA342 How to Order SA 04 VGA342 A VA Port size Passage A Normally closed (N.C.) B Normally open (N.O.) Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O.

VQ7-6/7-8

Side Bottom Cylinder port location Rc Nil NPTF T G F P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

VM

B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 5-8-13 8 Series VH Dimensions: Panel Mounted VH41-02 to 04 VH41-06 ( ): Long handle type ( ): Long handle type 2 (A) 4 (B) 4 (B) 2 (A) 25 (32) 107.5 19 102 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 4-6.6 4-6.6 88 81 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) Stroke range (mm) 40 50 63 80 100 S A AL B B1 C D E F H1 MM K M KA J HX N RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6

IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7 Refrigerated Air Dryer Series IDU Medium IDU22C, 22C1, 37C, 37C1, 55C, 75C Compressed air inlet Compressed air outlet (K) B (H) A (F) (G) (E) Run light Operation switch (Aftercooler) (Aftercooler) Stop switch Outlet air

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

air-filter-e

AFF75B AFF-EL75B AFF2C AFF-EL2B AFF-EL2B-F AFF4C AFF-EL4B AFF-EL4B-F AFF8C AFF-EL8B AFF-EL8B-F AFF22C AFF-EL22B AFF-EL22B-F AFF37B AFF-EL37B AFF-EL2B AFF-EL37B AFF-EL4B AFF-EL8B AFF-EL11B AFF-EL22B AFF-EL75B Except option F For option F Element assembly Cotton paper, others AFF-EL11B AFF-EL11B-F 4 AFF-EL2B-F AFF-EL4B-F AFF-EL8B-F AFF-EL11B-F AFF-EL22B-F 1) Element assembly: With gasket

Air Preparation Equipment

AFF75B AFF-EL75B AFF2C AFF-EL2B AFF-EL2B-F AFF4C AFF-EL4B AFF-EL4B-F AFF8C AFF-EL8B AFF-EL8B-F AFF22C AFF-EL22B AFF-EL22B-F AFF37B AFF-EL37B AFF-EL2B AFF-EL37B AFF-EL4B AFF-EL8B AFF-EL11B AFF-EL22B AFF-EL75B Except option F For option F Element assembly Cotton paper, others AFF-EL11B AFF-EL11B-F 4 AFF-EL2B-F AFF-EL4B-F AFF-EL8B-F AFF-EL11B-F AFF-EL22B-F 1) Element assembly: With gasket

Air Fittings & Tubing

D1 Port B D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 min. port size a b 16 17 17 KM16-04-06-3 6 16 16 17 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 12.8 68 20.9 16 11 14.5 50 10.5 2.1-38 Miniature Fittings M3, M5, R(PT)1/8 Series M Hose nipple Barb fitting Tube Either nylon, soft nylon and polyurethane tubing.

VQ5000

U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .

LEC-OM02704CN

14 45 14 (c) [C][7][0][1][F][F] 14.4.2 [C][7] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM (d) [C][8][0][1][F][F] 14.4.2 [C][8] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM 14 46 14 (e) (DWELL) (DWELL) [C][A][0][1][F][F] 14.4.2 [C][A] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM (f) [C][B][0][1][F][F] 14.4.2 [C][B] [0][1][F][F] 0 16 0

Smooth Cylinder/Low Speed Cylinder

Foot: CS2YL H K A AL F S + Stroke With rod boot Width across flats KA Port REA V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve MM REB REC D B E e LH LY CY CY 4 x LD CX f l LX Y N X LS + Stroke N X Y LT MQ B C ZZ1 + l + Stroke h + l ZZ + Stroke RHC (mm) RZQ Bore size (mm) Stroke range (mm) B C A AL B D E F G J V W K KA LD LH LS 125 140 160 50 47 143 143 115 32 71 43 15 M14 x 1.5 15 17 15 27

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Weight of solenoid valve only. 2(B) 4(A) 2(B) 4(A) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 1(P) SV3000 and 4000 are not available with 4 position dual 3 port valve. 181 Directional Control Valves Air Grippers Modular F. R.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

VCC

3 A-y A-u A-i A-y B-q B-w B-e B-r B-w B-t B-y B-t Orifice body PTFE seal O-ring Sleeve O-ring O-ring O-ring Name plate O-ring O-ring Orifice body Name plate O-ring O-ring O-ring O-ring Orifice O-ring O-ring Name plate O-ring O-ring O-ring O-ring PEEK resin Special PTFE Special FKM POM Special FKM Special FKM Special FKM Special FKM Special FKM PEEK resin Special FKM Special FKM HNBR Special

PF2A/PF2W

.S. or less 5% F .S. or less Data Repeatability Note 3) 1% F .S. or less 3% F .S. or less Temperature characteristics 2% F .S. or less (0 to 50C, based on 25C), 1% F .S. or less (15 to 35C, based on 25C) Current consumption (No load) 60 mA or less 50 mA or less Weight 45 g Maximum load current: 80 mA Internal voltage drop: 1V or less (With load current of 80 mA) Maximum applied voltage: 30