2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: M (SI units only), Bracket: S (Bracket (mounting position: Stream side)), Operation Manual/Calibration Certificate: K (with Operation

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration Certificate

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side)), Operation Manual/Calibration Certificate: T (Calibration Certificate

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side)), Operation Manual/Calibration Certificate

VQC

B Silencer (For EXH port) AN200-KM8 AN203-KM8 Back pressure check valve assembly [-B] VVQ1000-18A 19 Individual EXH spacer VVQ1000-R-1-C6 COM 13 C6 (EXH port) Connector terminal no. 6 One-touch fitting Standard manifolds are for double wiring, but mixed wiring (single and double wiring) can be specified as options.

Secondary Batteries

(mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

5 Port Solenoid Valve Series SQ1000/2000

EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3, C4, C6 A, B port 43.5 58 P = 11.5 Dimensions Formulae L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90 107.5 137.5 148 4 101.5 119 150 160.5 5 113 130.5 150 160.5 6 124.5 142 162.5 173 7 136 153.5 175 185.5 8 147.5 165 187.5 198

smcmaintenancepartslist

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS !1 Rod seal Set of left nos. !0, !1, !2. !

modular-press-e

-MLA ISE35-N-65-M PNP output/Wiring top entry ISE35-R-65-MLA ISE35-R-65-M N.O.

Modular F.R.L. Pressure Control Equipment

-MLA ISE35-N-65-M PNP output/Wiring top entry ISE35-R-65-MLA ISE35-R-65-M N.O.

Intrinsically Safe Valve

The safety barrier must meet the specifications listed in the Installation Instructions section. 14 Series 53-SY5000/7000 Manifold Specifications 53-SS5Y5-20 53-SS5Y7-20 Model 53-SY520 53-SY720 Applicable valve Manifold type Single base B mount P (SUP)/R (EXH) Common SUP/EXH Valve stations 2 to 20 stations Note 1) A, B port location Valve 1/4 P, EA, EB port 1/8 C4 (4 One-touch fitting) C6

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

6 One-touch fitting SZ360--C6 84.1 3 position 4 position 81 68.3 75 2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4

3 Port Solenoid Valve Metal Seal Series VZ200 1

20 20 stations Rc 1/4 Built-in One-touch fittings Applicable tubing O.D. 6 C6 Manifold specifications/Single base type B mount (P/E port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

pilot operating pressure range MPa SY3000 SY5000 Air 0.15 to 0.7 2 position single 2 position double 3 position 0.1 to 0.7 0.2 to 0.7 100kPa to 0.7 2 to 16 stations Location Direction P/R ports Base Side C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting)/C8 (8 One-touch fitting) C6: PA/B

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

4/5 Port Air Operated Valve SYJA3000 Series

SYJ7000-21-1A 1 pc. 5(R) 1 (P) (R)3 5(R) 1 (P) (R)3 3 position pressure center 4(A) (B)2 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 5(R) 1 (P) (R)3 Caution Be sure to read this before handling the products.

4/5 Port Air Operated Valve Series SYJA3000 1

the manifold base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.