Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, the conductance C results from V the average velocity of the gas, R the gas constant, M the molecular weight and T the absolute temperature. From the formula C=VA/4=(RT/2M)0.5A, the conductance for 1cm2 is C=11.6A l/sec, at an air temperature of 20C.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

5 Removal: Black painting M/O knob Zinc die cast Alloy steel !6 Using a pair of internal C-clip pliers, remove snap ring A. By pulling out MGF Black zinc chromated M/O bolt M/O spring !7 the piston rod while covering the rod cover port with your finger, packing Zinc chromated Steel wire !8 retainer B and rod seal C will come out. CY1 Stopper ring Zinc chromated Carbon steel !

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

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red spec i cat on (M), Indrcale separaEly o. a ma.ilo d spe.ilicalion sheel Manifold Circular Connector Series .

CS1

Wiper ring Piston seal Valve seal Tube gasket Holder gasket Rod seal 125 CS1H125A-PS SDR-36 P7 C120 G55 RPS-125 SKY-36 140 CS1H140A-PS SDR-36 P7 C135 G55 RPS-140 SKY-36 160 CS1H160A-PS SDR-40 P7 C155 G55 RPS-160 SKY-40 1.10-6 Series CS1 Basic/CS1B Lube (CS1B), Non-lube (CS1BN), Air-hydro (CS1BH) With auto switch/CDS1B (mm) Stroke range (mm) Bore (mm) Style M KA K MM EA C D E B A AL J G FA

Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (SI Unit Only), Option 2: R (w/Bracket), Calibration Certificate: A (Yes)

Rated Flow Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only), Option 2: R (w/Bracket), Calibration Certificate: A (Yes)

Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: N (NPT), Port Size: 06 (3/4), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Unit Selection Function, Option 2: R (w/Bracket)

Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only), Option 2: R (w/Bracket), Calibration Certificate: A (Yes)

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m), Unit Specification: M (SI Unit Only)

Rated Flow Range: 20 to 2000 L/min, Thread Type: NPT, Port Size: 3/4, Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: w/M12 -M8 Conversion Lead Wire, 0.1 m, Unit Specification: Unit Selection Function, Option 2: w/Bracket, Calibration Certificate: -

Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specification: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Table of Contents

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

Aluminum High Vacuum Angle Valve

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m.

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