Table of Contents

DC: 1 W (With indicator light: 1.5 W) AC Supply valve and release valve A Supply valve (N.O.)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

modular-press-e

OUT IN Model Optional specifications r w e t Bracket assembly Note 1) AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 AD17 N.C. N.O.

Modular F.R.L. Pressure Control Equipment

OUT IN Model Optional specifications r w e t Bracket assembly Note 1) AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 AD17 N.C. N.O.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

stations: W = 54n + 264 Note 3) SY3000 Weight W (g) n: Stations (D-sub connector) Main valve/pilot valve common exhaust type Internal pilot External pilot Pilot exhaust type Pilot valve individual exhaust type SY5000 Lubrication Not required Unrestricted 150/30 Dust proof Mounting orientation Impact/Vibration resistance m/s Note) Note 1) Available with up to 16 solenoids.

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Adapter B Ejector indication Nozzle dia./1.8, 2.0 mm ZR1-W 1 18 20 2 1 1 1 1 1 (Mounting hole) Silencer Adapter E Spacer B (Mounting hole) Rc 1/8 V port (Vacuum port) 1 M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

VZ100/300/500

pilot VV3Z3-20-1 VZ32 1 8 0.47 0.43 0.13 0.74 0.32 0.19 M5 x 0.8 1 8 M5 x 0.8 0.71 0.98 0.71 1.00 0.68 1.00 0.52 0.36 0.49 0.37 0.35 0.27 0.21 0.25 0.2 0.26 0.17 0.25 0.81 0.92 0.80 0.96 1.00 1.00 0.28 0.24 0.23 0.25 0.25 0.30 0.20 0.22 0.19 0.24 0.24 0.26 VV3Z3-40-2 1 8 1 8 Base mounted For internal pilot 1 8 M5 x 0.8 VZ34 1 8 1 8 VV3Z3-40-1 1 8 1 8 C4 C6 Body ported For external pilot

Modular F.R.L. Units

Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.

High Vacuum Angle Valve

How to Order [Option] XLCV M9N A 16 1 G L Flage size 16, 25, 40 XLCV M9N A 50 1 1 G Flage size 50, 63, 80 XLCV q r t w y e u i o !1 !

VDW30/40-XF

rated voltage Allowable voltage fluctuation Coil insulation type Class B 500 VDC, 10 M or more Insulation resistance Voltage limit 1800 VAC, 1 sec., 3 mA or less Simulation noise: 500 Vp-p (Based on 1 sec. pulse width, 50 10 Hz frequency noise simulation) Noise tolerance Note 3) Fast transient noise: IEC61000-4-4: 1 kV VDW30: 3 W (With 0.5 W power-saving circuit) VDW40: 6.5 W (With 1 W

VQC

COM External pilot Low wattage type (0.5 W) Nil K N R Y (A) 4 (B) 2 Note 1) C Note) 5 (R1) 3 (R2) 1 (P) Seal type 5 (R1) 3 (R2) 1 (P) Note 2) 0 1 N.C N.O Metal seal Rubber seal 3 position closed center Note) For rubber seal type only.

Serial Transmission System Series EX250 Series EX500

Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A1W Enclosure IP67 Series DIN rail length specified 1 2 SV1000 SV2000 Standard length Nil 3 SI unit specification Specify a rail longer than the standard length.

Secondary Batteries

Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

Intrinsically Safe Valve

1/4 1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) N7 (1/4" Onetouch fitting) N9 (5/16" Onetouch fitting) 1/4 C6 (6 One-touch fitting) C8 (8 One-touch fitting) N7 (1/4" Onetouch fitting) N9 (5/16" Onetouch fitting) C10 (10 Onetouch fitting) N11 (3/8" Onetouch fitting) Port size A, B port Manifold base weight W (g) n: Stations W = 100n + 151 W = 79n + 127 W = 61n + 101 Note 1) For

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

= 26n + 172 11 to 16 stations: W = 26n + 199 Note 3) SX3000 Weight W (g) n: Stations Lubrication Not required Unrestricted 150/30 Dust proof 2 to 10 stations : W = 54n + 227 11 to 16 stations: W = 54n + 264 SX5000 Mounting orientation Impact/Vibration resistance m/s Note) Note 1) Available with up to 16 solenoids.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Compact Manifold Regulator

A R 04 Z A q w e r u t y N Common Supply Type 1.