2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

VCC

1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

5 Port Air Operated Valve Series SYA3000/5000/7000 1

center JIS Symbol 5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Furthermore, when mounting supply/exhaust block assemblies on both sides of type B with a 2 to 10 station manifold, calculate the weight W using the formula for 11 to 16 stations.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable

A

/4-16 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 2.76 2.34 2.72 4.64 2.48 3.37 9.38 2 9/32 1 3/8 7/8 1/2 27/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 3.32 2.34 2.72 4.64 2.48 3.37 9.38 2 9/32 1 3/8 7/8 1/2 27/64 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S A D J U S T A B L E S T R O K E R E T U R N X C 9 O P T I O N XC9 A NC A1 A U T O S W I

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

PA/B 3.6 (0.2) A/BR 3.24 (0.18) Rc(PT)1/8: Rc(PT) 1/4: M5: PA/B 3.42 (0.19) A/BR 3.24 (0.18) PA/B 3.6 (0.2) A/BR 3.6 (0.2) C4: C8 : C4: Valve effective area mm2 (Cv factor) Note 2) C6: C10: C6: C8: Manifold base weight W (g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated

Serial Transmission System Series EX250 Series EX500

VDC 5 PEB EA N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) 4 2 A B C: Locking type (Manual) BNote) Note 1) Function 1 5 3 Standard type (1 W) High voltage type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y P EA EB N.O N.O 2 Note 2) 2 position double (rubber) 4 position dual 3 port valve (C) Seal 4 2 A B CNote) Note 3) 0 1 Metal seal Rubber

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

VQC

) Type of actuation Light/Surge voltage suppressor 2 position single 4 position dual 3 port valve (A) (A) 4 (B) 2 (A) 4 (B) 2 With Without Note) Nil E 1 A Note) 5 (R1) 3 (R2) 1 (P) Note) Not applicable to S kit. 5 (R1) 3 (R2) 1 (P) N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) (A) 4 (B) 2 (A) 4 (B) 2 B: Locking type (Slotted) Coil voltage B 12 VDC 5 6 24 VDC Note) Note

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(A) (A) (A) 2 (A) 2 2 2 1 (P) 3 (R) 1 (P) 3 (R) h h 1 (P) 3 (R) 1 (P) 3 (R) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note Zinc die-casted No.