Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

1

C6 1 0 e t r y u i o !

I

10V DC 2 1/4 (2000, 3000 Type) 3 3/8 (2000, 3000 Type) 4 1/2 (3000 Type) T H R E A D T Y P E M O N I T O R O U T P U T Rc N NPT T NPTF F G 1 Analog Output 1 ~ 5V DC 2 Switch Output / NPN Output 3 Switch Output / PNP Output 4 Analog Output 4 ~ 20mA DC Courtesy of Steven Engineering, Inc. !

V

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Precision Regulator

. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 IR1000 series

SMC Electronic Switch Series Variations

8 NPT 1/8 None With sealant 01 N01 S X201 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X202 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X215 3.12-1 Mechanical Style Pressure Switch IS1000 Construction 5 50 20 500 t PSE u ZSE4 ISE4 0.1 (1) 0.2 (2) y 0.3 (3) ZSE5 ISE5 0.4 (4) i MPa {kgf/cm2} 58.5 ZSE6 ISE6 q Components !

NCX2 seies

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

IR1000/2000/3000

example> 5 Spacer Approx. 133 Approx. 172 97.5 3 L bracket 4 T bracket 135 1 AF2000 IR1000 2 AFM2000 178 1 AF3000 IR2000 2 AFM3000 234 1 AF4000 IR3000 2 AFM4000 Accessories (Optional)/Part Nos.

Air Cylinder NCX2 Series Slide Unit

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

25

Nut, 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Applicable tube size (inch) Size Symbol 2 1/4" x 5/32" A Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting.

ZSE20(F)_ISE20

output P PNP open collector 1 output Symbol Description Nil Unit selection function1 M SI unit only2 P Unit selection function (Initial value psi)1 1 Under the New Measurement Act, switches with the unit selection function are not permitted for use in Japan. 2 Fixed unit: kPa, MPa y Option 2 t Option 1 r Piping specification Symbol Description Nil None Symbol Description Symbol Description

Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

VMx-OMP0001

B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

IS1000

X201 R 1/8 NPT 1/8 None With seal Lead wire length 3 m Regulating pressure range 0.1 to 0.6 MPa Nil S X202 Lead wire length 3 m Regulating pressure range 0.1 to 0.6 MPa X215 16-9-1 2 Series IS1000 Construction 5 500 50 20 t u 0.1 0.2 y 0.3 0.4 i 58.5 MPa q Component Parts !

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: T (Panel Mount Adapter for w/o Flow Adjustment Valve)