Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Bottom, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

VM

port Bottom ported 3 port 2 port Side ported 3 port 2 port One way roller lever Bottom ported 3 port 2 port Toggle lever Side ported 3 port 2 port Bottom ported 3 port 2 port Side ported 3 port 2 port Bottom ported 3 port 2 port Green Green Green Green Black Black Black Black Red Red Red Red Bottom ported 3 port 2 port Push button Side ported 3 port 2 port Bottom ported 3 port 2 port Side

PSE540/560

N01 NPT1 /8 (With M5 female thread) ZSM Connector for PSE200 1 pc. ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

A

1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT Courtesy of Steven Engineering, Inc. !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

2 !

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Urethane rubber Fluororubber Silicon rubber ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 17 EPR N ZCUK NBR 33 40 0 +10 +1 1 40 S 40 Silicon rubber 63 50 0 +19 +1 2 50 U 50 AMJ Urethane rubber 103 63 0 +37 +2 3 63 F 63 Fluororubber 206 80 +61 0 +2 6 80 E 80 AMV EPR 390 100 1 +121 12 +4 100 100 Pad type 125 3 +7 +228 22 125 125 AEP HB Large bellows pad HEP Dimensions Related Equipment

Table of Contents

GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 Round type 0.2 MPa (4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Micro Mechanical Valve Series VM1000

port Bottom ported Mechanical operation Manual operation 3 port 2 port 3 port 2 port Side ported 11 Roller lever Bottom ported 3 port 2 port 3 port 2 port Side ported One way roller lever 12 Bottom ported 3 port 2 port 3 port 2 port 3 port 2 port 3 port 2 port Side ported 20 Toggle lever Bottom ported Red Side ported Black Red Red Red Bottom ported 3 port 2 port 3 port 2 port 3 port 2 port

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

PSxx-OMS0006CN

3585RH() CE/UKCA UL/CSA(E216656) 2 m 1(0 ms) 2 3MPa/kPa 490 M5 01 N01 C4H C6H N7H C4L C6L N7L M50.8 R1/8 NPT1/8 4 mm 6 mm 1/4 5/32 inch inch 4 mm 6 mm 1/4 5/32 inch inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g 35 g 2(AWG26) 0.15 mm 1.0 mm (3 ) 3.4 -63No.PS-OMS0006CN-G M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

ARJ1020F

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 VBA 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 VE VY1 26.1 3 R, NPT 1/8 13.6 18.3 G 26.1 PPA AL 14-4-13

Miniature Regulator

ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R1/8, M5 x 0.8 NPT1/8, M5 x 0.8 Rc 1/8 Symbol NPT 1/8 4 One-touch fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions. 0 1 G 3/8 Note 2) F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1) R 3/8 R 1/2 10-32 UNF NPT 1/8 N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 614 Series AS20-T Tamper Proof Speed Controller Standard Type, Elbow