Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/o Flow

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

5 Port Solenoid Valve Series SY3000/5000/7000/9000

[35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9 Applicable cable O.D. 3.5 to

5-Port Solenoid Valve

D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" Connector Connecting Base (Station n) (Station 1)--D-sub, Flat Ribbon ( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) Terminal Block 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 Lead Wire A 4 A 4 A 4 A 4 A 4 Circular Connector EX500 * These figures show the SS5Y3

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

Series SV

With external pilot specification (Pitch) P = 20.5 48.6 21.3 18 11 23.5 11.8 11.6 13.5 36.1 37.6 60.3 3 5 E 3 5 E 4 A 4 A 4 A 4 A 4 A 36 76.8 E 3 5 E 3 5 4 A 4 A 4 A 4 A 4 A 59.5 2 B 2 B 2 B 2 B 2 B 1 P 1 P C2 2 B 2 B 2 B 2 B 2 B 1 P C2 1 P x PE X PE C1 2-M12 C1 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing

1

U and/or D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" (Station n) (Station 1)--( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 A 4 A 4 A 4 A 4 A 4 Note 1) These figures show the SS5Y3-12F2-05D.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

) C6: 33.6 N7: 37.4 Note) Refer to page 176 for dimensions of connector types. 48 Body Ported 10-SY3000/5000/7000/9000 [ ]: AC Dimensions: Series 10-SY5000 2 position single Grommet (G), (H): 10-SY5120(-F2) G H C4, N3 C6, N7 C8, N9 Foot bracket 10-SY5120-F1 G H C4, N3 C6, N7 C8, N9 47 38 2 x M3 x 0.5, thread depth 4 (For mounting bracket) 22.6 12.7 16.7 16.6 29 22 + (For mounting) 2 x 3.2

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) [Communication connector D-sub] (76.8) (External pilot specifications) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

SV

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) 2-M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 SV 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 SZ 3 3 PWR 3 3 42.7 5 3 E 3 5 E 5 3 E 3 5 E T T 43 PWR 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" 1 1 1 1 BUS 4632

4/5 Port Solenoid Valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

5 Port Solenoid Valve

2 x C8, C6, N7, (1(P), 3(R) port) C8: 8 one-touch fitting C6: 6 one-touch fitting N7: 1/4" one-touch fitting Dotted line indicates DIN rail mounting bracket (-D).

0.4

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

SX

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

Valve Single Unit

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

Valve Single Unit

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

5 Port Solenoid Valve SY Series

13.1 28.5 [35.5] (15) 10 0.8 2 P EA EB 21.5 die-cast hole (For manifold gasket positioning) 19 M5 x 0.8 (P, EA, EB port) L plug connector (L): SY3220-L(-F ) 1 2 1 2 C4, N3 C6, N7 M plug connector (M): SY3220-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3220-W0(-F ) C4, N3 C6, N7 1 2 (Lead wire length) 108.6 [113] Approx. 300 28.5 [35.5] 13.1 33 15.5 M8 x 1 39.6 [46.6] Approx. 300 (Lead wire

7.5

34.3 23.6 15.4 15.6 3/5 3/5 2 2 2 2 2 30.6 32.1 1 1 4 4 4 4 4 D D One-touch fitting One-touch fitting [4(A), 2(B) port] M5 x 0.8 [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" L4 L3 U side D side Valve lock switch Switch for locking a connector C6: 18.1 N7: 20.6 C6: 9.6 N7: 12.1 (9.1) 8 (1.8) 20.8 5.5 21 7.5 COM 6 PWR

45

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M