Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

None Nil ASV120F/E220F Type With seal S ASV310F/410F/510F 1 2 Tee Elbow Note) Applicable tubing O.D. Metric size Flame resistant resin body as standard.

1

13.6 10.6 BUS IN 56.6 E 3/5 2 B 2 E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR PWR 4 A 4 21.6 4 A 4 A 4 A 4 A 4 A 18 46.5 (17.8) 46.5 (7.5) (11.8) P = 10.5 (Pitch) 15.5 Note 1) These figures show the SS5Y3-10SQA-05D-C6.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

V

U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S 40R H O W T O O R D E R VQ B A S E M O U N T E D S E R I E S (P L U GI N) S E R I E S Y SY X SX VQ 0 R O R D E R A S S TA N D A R D T Y P E S I Z E F O R E X T E R N A L P I L O T S I Z E 3 5 7 A S S TA N D A R D 1 2 O R D E R A S

Vacuum

E o.o72 (0.005) 2 0 oI a ZFB10G04 a ?

Vacuum

E o.o72 (0.005) 2 0 oI a ZFB10G04 a ?

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Regulator for 2 MPa ARX 20

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX 20 Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (max. thickness 4.5) 44 79.5 (when regulating pressure = 82) 5.4 10 31.5 OUT OUT 35 Options Bracket Panel nut Material 1348110A POM, NBR (gasket) Material 1348112 SPCC (black zinc chromated) Part No. Part No.

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

25

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more).

SMC Electronic Switch Series Variations

Gap too small Green 2 a Place the gap gauge on the detection nozzle for precise adjustment. s Confirm applied air pressure.

ARX Series

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX Series Specialty Regulators Regulator for 290 psi (2 MPa) ARX20, 21 Dimensions Panel cutout dimensions 1.02 (26) R .1 (2.5) SUP OUT SMC K C O P A A L U S H .5 (12) 1.61, 2.13 [41 (K40)], [49 (K50)] 2.13 (54) .98 (25) 1.6 (max. thickness 4.5) 1.73 (44) .21 (5.4) 3.13 (79.5) (when regulating pressure = 3.23

NCX2 seies

Eack (white) lead wire: connecl lo load (to lhe inpul of squence conlroller and outlel 3 wire sltlsn (l44ren povt sqroe lor s* bh and bsd is n01 conmofll Brown^{Red) I Pm]ffie,'e-| ' Elue.IBlack)L.: . Blue (Black) l6ad wire: Connecl lo the power source O. 2 wire system -Brown (RedE-@ I l ' : L o a d L _ o I L Bl!%(9!csiL -re o Series NCDX2 Switch Circuit cD-P12 D-A73, D-A73H.

ZISE40A.eng

Specification NOTE The direct current power supply to be used should be UL approved as follows : Circuit (of class 2) which is of maximum 30Vrms (42.4V peak) or less, with UL 1310 class 2 power supply unit or UL 1585 class 2 transformer. The Pressure switch is a approved product only if it has a mark on the body.

Air Cylinder NCX2 Series Slide Unit

Eack (white) lead wire: connecl lo load (to lhe inpul of squence conlroller and outlel 3 wire sltlsn (l44ren povt sqroe lor s* bh and bsd is n01 conmofll Brown^{Red) I Pm]ffie,'e-| ' Elue.IBlack)L.: . Blue (Black) l6ad wire: Connecl lo the power source O. 2 wire system -Brown (RedE-@ I l ' : L o a d L _ o I L Bl!%(9!csiL -re o Series NCDX2 Switch Circuit cD-P12 D-A73, D-A73H.

ZL3-OM00801

3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [Hz] 5 [DCV] 24 10 [W] 0.4 *1 JIS B 8419:2010 20 9.3 9.4 GZ33-K1K-01-X56 GZ33-P1C-N01-X55 kPa inHg/psi -100100kPa -30inHg14psi R1/8 NPT1/8 3F.S ,5F.S [g] ZL3 ZL6 390 470 +80 +25 +20 +60 / +120 , +80 +30 +60 22 No.ZL3-OM00801-A 9.5 ZSE10 [kP] -1010 -100100

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)