Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Base Side Location Direction A, B port Piping specifications 1 4 1 4 M5 x 0.8 1 8 P, EA, EB port Port size 1 8 1 8 1 4 1 4 A, B port C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for

SY

Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 A, B port C4 (4 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C4 (4 One-touch fitting) C8 (8 One-touch fitting) C10 (10 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) P to A/B 3.96 (0.22) A/B to EA/EB 4.14 (0.23) C6: P to A/B 9.54 (0.53) A/B to EA/EB 9.0 (0.5) C8: P to A/B 16.2 (0.9

1

U and/or D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" (Station n) (Station 1)--( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 A 4 A 4 A 4 A 4 A 4 Note 1) These figures show the SS5Y3-12F2-05D.

SX

Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no. Port size M5 x 0.8 Rc Rc Round head combination screw SX3000 SX3000-38-1 A SX5000 SX5000-38-1 A SX7000 SX7000-38-20A 1 8 1 4 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

SQ1000/2000

SUP/EXH block Note 1) SSQ1000-PR-3-C8-(S) Back pressure check valve Note 2) SSQ1000-BP SUP block plate SSQ1000-B-P EXH block plate SSQ1000-B-R Port plug Note 3) P R A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B Note 4) C3 (N1) With 3.2 (1/8") One-touch fitting C4 (N3) With 4 (5/32") One-touch fitting C6 (N7) With 6 (1/4") One-touch fitting

VQZ1000/2000/3000

A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5

V100

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

0.4

) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n:

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) [Communication connector D-sub] (76.8) (External pilot specifications) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Sensors D side U side n Stations 8 7 6 5 4 3 2 1 DIN rail clamp screw C10 [3(R) EXH port] C10: 10 One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 =

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Sensors D side U side n Stations 8 7 6 5 4 3 2 1 DIN rail clamp screw C10 [3(R) EXH port] C10: 10 One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 =

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 8.6 9.5 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 3 PWR 3 3 42.7 3 5 E 5 3 E 5 3 E 3 5 E PWR 43 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 1 1 1 1 BUS 0 BUS 0 0 0 PE PE X

0.4

socket 2 x M12 VQ7 DIN rail clamp screw R R 0 76.5 BUS 3 3 X 1 X 1 60 49.5 B B B B B B B B 12 12 2 P P PWR 30 3 25 1 10 (12) 1 A A A A A A A A 13.5 25 M3 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C10: 10 One-touch fitting