3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Locking style (Slotted) Except for VQZ 1000 0.6 0.7 (A) 4 1 (P) 5 (R) Except for VQZ 1000 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ 0.45 0.6 (A) 4 VQD VZS 1 (P) 5 (R) Except for VQZ1000 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 2-2-54 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 1(P) port 2-Rc 1/2 SMC SMC SMC SMC SMC SMC SMC VQC 20.5 15.7 101 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 72 12 60 43.5 42.7 SQ 18 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 (6.5) 21.5 Pilot exhaust port 2-Rc 1/8 External pilot port 2-Rc 1/8 11.5 27 31 VQ4 2n-Rc 1/4,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: 6, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence, Display:

MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Note 8 Pad ZP3E-mmm Flat/Bellows type with groove r 9 Plate ZHP1-PLm-A 10 Holder ZM u e 11 Plug TB00148 Included for metric size ZL TB00055 Included for inch size q w 12 One-touch fitting KJHm-C2 ZH 13 Ejector assembly ZK2-EJmW-A A A 14 Silencer assembly ZHP1-SA1-A ZH 15 Lock screw CA00284 Included ZH -X267 3 pieces are included in one product. (The part numbers are for 1 piece.) !

VQ1000V-OMV0001

-2No.VQ1000V-OMV0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 * * * *3) 3) 3) 3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () -3No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / 0.1 2 C-R () C-R DC 3 AC 8% (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) / / / / () 3 (C-R ) OFF 3 2)() 3) AC ,, SSR SSR 1) 2) ,1V -10 EXH Assy ( ( ( ( ) ) ) ) () 3 () 4 No.VQ1000V-OMV0001

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.