Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: Rc 1/8, Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

CXS

-2 8-28-3 3 Series CXSJ Specific Product Precautions Be sure to read before handling.

CXS

-2 8-28-3 3 Series CXSJ Specific Product Precautions Be sure to read before handling.

SV

With External Pilot Specifications (Pitch) 24 P = 24 48.6 11 25 11.8 20 14.5 13.7 E 3/5 E 3/5 E 3 E 3 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 4 A A 4 35.8 40.4 35 58.3 63.9 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 C2 C2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) P = 10.5 13.5 46.9 18.3 11.8 14.1 8.4 8.6 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 10 19.7 24.6 23 5 3 E 5 3 E 3 5 E 3 5 E 43.2 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 C2 C2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" PE PE X X C1 C1 2 x M12 One-touch fitting [PE: Pilot EXH port] Applicable tubing

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Fluoropolymer Piping Equipment

24 24 9 18 21 21 43 43 28 28 17 26 44 44 54 23 23 39 3.6 LQ1T41-R12 6 12 12 29 26 54 39 3.6 LQ1T41-R22 10 6 12 6 24 20 24 9 18 21 21 43 38.5 43 28 23 28 3.6 LQ1T41-R23 6 6 12 7 20 29 14 28 17 26 44 44 54 23 39 3.6 LQ1T41-R26 12 3 12 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 1.8 LQ1T41-R32 6 12 6 15 24 15 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T41-R34 3 12 3 1.8 LQ1T51-R2 19 10 19 7 29 20

HRX-OM-X084

Table 3-10 Piping port size Description Port Recommended Recommended piping size tightening torque specifications Circulating fluid outlet port Rc1/2 28 to 30Nm 0.4MPa or more*2 Circulating fluid return port Rc1/2 28 to 30Nm 0.4MPa or more*2 Facility water inlet port *3 Rc3/8 22 to 24Nm 1.0MPa or more (Supply puressure: 0.3 to 0.5MPa) Facility water outlet port *3 Rc3/8 22 to 24Nm 1 For NPT

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Table of Contents

10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

28 Bore size With air cushion Air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

28 Bore size 11 11 10-0.022 0 12-0.027 0 With air cushion With air cushion type is not available for 21-/22-CJ2.