A

28 80 22 Courtesy of Steven Engineering, Inc. !

Table of Contents

10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Table of Contents

16.5 22 28 Reference dimensions after Uni thread installation.

KJ

14.3 14 28 47 1 4 3 8 3 8 KQ2V10-U02 Applicable tubing 20.6 31 18.5 28 34 10 18.5 21 27 20.3 14 KQ2V10-U03 KQ2V12-U03 17 Connection thread 36.5 39.5 20 22.5 30.5 31.5 12 22 39 30.8 20.9 25.2 34 1 2 KQ2V12-U04 Reference dimensions after Uni thread installation.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

28 Bore size With air cushion Air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

28 Bore size 11 11 10-0.022 0 12-0.027 0 With air cushion With air cushion type is not available for 21-/22-CJ2.

MY1

M14 x 2 11 200 2 128 15 M8 x 1.25 47 43.5 MY1C50 29 100 84.5 230 19 12.5 29.5 27.5 39.5 130 32 M16 x 2 13.5 230 5.5 152 16 M10 x 1.5 50 56 MY1C63 32.5 115 104 (mm) W1 NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NF NH VV XX Z 118 120 90 10 380 26 90 28 35 10 35 24 144 22 MY1C50 128 81 28 74 400 83.5 142 140 110 12 436 42 110 30 49 13 43 28 168 25 MY1C63 152 103 30 92 460 105 Y 2-d R WX

A

NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,

EX500-GPR1A.eng

SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.

MXW Series Long Stroke Slide Table

My Mp W W L2 B2 W C2: Correction value for moment center distance L1 A2 L3 C2 My (mm) A2: Correction value for moment center distance MXW 8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 B2: Correction value for moment center distance (mm) Mr (mm) W Mp 10 10 14 20 28 W MXW 8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 W Dynamic moment Moment due to impact of load at end

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

Mechanical Valves Series NVM, NVFM, NVZNI

231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6 Smm) '75 PSIG (5 Kgf/cm2) -75 PSIG (5 Kgflcmz) A B c D E F G H J 4.29 (109) 3.01 76.5) 0.96 e4.51 't.28 32.5'l 0.06

IIIIIII

231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6 Smm) '75 PSIG (5 Kgf/cm2) -75 PSIG (5 Kgflcmz) A B c D E F G H J 4.29 (109) 3.01 76.5) 0.96 e4.51 't.28 32.5'l 0.06

Compact and Lightweight

11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch

MXW

Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount My L1 A2 L3 C2 (mm) B2: Moment center position distance compensation amount MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 A2: Moment center position distance compensation amount Mr (mm) (mm) W Mp MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 8-7-2 3 Long Stroke Slide Table

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Title not found

Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

Title not found

Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

17

D 40 55 74 H 3.2 4.5 4.5 J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B 78 94 112 C 39 47 56 F 100 124 144 Ea 1 1 1 Eb 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 55 60 72 22 22 32 M6 x 1 M6 x 1 M8 x 1.25 5.5 5.5 6.5 12 12 16 9.5 9.5 11 Mounting direction (2) B1 28 40 44 Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Applicable cylinder MY1B25 MY1B32 MY1B40 A2 B2 C2 D2 F2 K2 Q2 Part

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. *